Abstract:Recently, considerable attention has been drawn to the field of micro/nanofluidic channels. However, current methods for fabricating micro/nanochannels are complex, costly, and time-intensive. In the present work, we successfully fabricated transparent submicron-channels on fused silica substrates (SiO2) using a straightforward laser process. To achieve this, a single-pulse excimer laser irradiation in a rear side configuration was employed to treat a thin film of UV-absorbing silicon suboxide (SiOx) through the transparent SiO2 substrate. A polydimethylsiloxane (PDMS) superstrate (coating layer) was applied over the SiOx film before laser exposure, serving as a confinement for controlled structure formation induced by the laser. Under optimal laser fluence, the thin SiOx film buckled, leading to the formation of channels with a width ranging from 10 to 20 µm and a height of 800 to 1200 nm, exhibiting a bell-like cross-sections following the so-called Euler buckling mode. Wider channels displayed morphologies resembling varicose or telephone cord modes. Subsequent high-temperature annealing led to the oxidation of SiOx, resulting transparent SiO2 channels on the fused silica substrate. The manufactured nanochannels exhibited promising potential for effectively transporting fluids of diverse viscosities. Various fluids were conveyed through these nanochannels via capillary action and in accordance with the Lucas-Washburn equation.

Fabrication And Characterization Of Sub-100/10nm Planar Nanofluidic Channels By Triple Thermal Oxidation And Silicon-Glass Anodic Bonding

Simple and Cost-Effective Fabrication of Two-Dimensional Plastic Nanochannels from Silica Nanowire Templates

Design and fabrication of a nanofluidic channel by selective thermal oxidation and etching back of silicon dioxide made on a silicon substrate

Fabrication and characterization of 20 nm planar nanofluidic channels by glass-glass and glass-silicon bonding.

Fabrication of Sub-10 Nm Planar Nanofluidic Channels Through Native Oxide Etch and Anodic Wafer Bonding

A Simple Technique for Sub-10 Nm Planar Nanofluidic Channel Fabrication

Fabrication of full glass chips with hybrid micro- and nanochannels and their application to protein concentration

Fabrication of 1D nanofluidic channels on glass substrate by wet etching and room-temperature bonding

Fabrication of 1-d nanochannels on PMMA substrate by photoresist-free uv lithography and UV-assisted bonding under low temperature

Fabrication of Fluidic Chips with 1-D Nanochannels on PMMA Substrates by Photoresist-Free UV-lithography and UV-assisted Low-Temperature Bonding

Fabrication of Enclosed Nanofluidic Channels by UV Cured Imprinting and Optimized Thermal Bonding of SU-8 Photoresist

Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding

Micro Etching Method Inside Microchannels

Fabrication of Micro/Nanofluidic Chip on Glass Substrate and Its Application for Electrokinetic Concentration of Proteins

Fast and Maskless Nanofabrication for High-Quality Nanochannels

Fabrication of micro/nano fluidic channels by nanoimprint lithography and bonding using SU-8

Investigation on the Electrochemical Manipulation of Bio-Molecules in Glass Nanofluidic Channels

Fabrication of fluidic submicron-channels by pulsed laser-induced buckling of SiOx films on fused silica

A Simple Approach for an Optically Transparent Nanochannel Device Prototype

Fabrication of Micro/Nanofluidic System with Water-Dissolvable Nanowires

Preparation of Rhombus-Shaped Micro/nanofluidic Channels with Dimensions Ranging from Hundred Nanometers to Several Micrometers.