Fabricating Technologies of Nanofluidic Chips and Their Applications

He Qiaohong,Chen Shuang
2008-01-01
Progress in chemistry
Abstract:The studies on the fundamental nanofluidics and various applications of nanofluidic chips in chemical and biochemical analysis have achieved fast progress in recent years. Both fundamental and applied researches on nanofluidics need nanofluidic chips that can be fabricated by means of micro- and nanofabrication technologies. This review introduces the developed techniques for fabrication of nanofluidic chips, including mask machining method, sacrificial layer technology, mold-machining method, chemical-mechanical polishing method, mechanical drawing method, and other fabrication technologies. The applications of nanofluidic chips in sample pretreatment and biochemical analysis are reviewed.
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