Abstract:A novel method based on plasma etching was proposed for monolithically integrating planar nanochannels and microelectrodes on a poly (methyl methacrylate) (PMMA) plate, and complete PMMA nanofluidic electrochemical chips with integrated microelectrodes were constructed by bonding with another PMMA plate containing microchannels. The fabrication sequences of nanochannels and microelectrodes were optimized. The oxygen plasma etching rate of PMMA nanochannels was studied, and the average rate was 15nm/min under optimal conditions. An UV-ozone assisted thermal bonding method was developed to realize a low-temperature chip bonding, and the variations in width and depth of nanochannels before and after bonding were 2% and 5%, respectively. As a demonstration, a nanoparticle crystal (NPC)-based nanofluidic biosensor with integrated Ag microelectrodes was designed and fabricated. Sub-microchannel arrays with a depth of 400nm and a width of 30μm on the biosensor functioned as filters, and trapped 540nm silica nanoparticles modified with streptavidin inside the connected microchannel to assemble the NPC. The interspaces in the NPC formed a three-dimensional nanochannel network with an equivalent diameter of 81nm. By measuring the conductance across the NPC, a high quality nanofluidic sensing of biotin was achieved. The limit of detection was 1aM, and the detection range was from 1aM to 0.1nM.

Fabrication of Fluidic Chips with 1-D Nanochannels on PMMA Substrates by Photoresist-Free UV-lithography and UV-assisted Low-Temperature Bonding

Fabrication of 1-d nanochannels on PMMA substrate by photoresist-free uv lithography and UV-assisted bonding under low temperature

Fabrication of full glass chips with hybrid micro- and nanochannels and their application to protein concentration

Bonding of Glass-Based Microfluidic Chips at Low- or Room-Temperature in Routine Laboratory

Fabrication of Micro/Nanofluidic Chip on Glass Substrate and Its Application for Electrokinetic Concentration of Proteins

Fabrication of Micro/nano Fluidic System Combining Hybrid Mask-Mould Lithography with Thermal Bonding

A Low Temperature Ultrasonic Bonding Method for PMMA Microfluidic Chips

Low‐Temperature Thermal Bonding of PMMA Microfluidic Chips

Fabrication of a Three-Dimensional Microfluidic System from Poly(methyl methacrylate) (PMMA) Using an Intermiscibility Vacuum Bonding Technique

Microfluidic Channel Fabrication by Pdms-Interface Bonding

Fabrication of Micro Pneumatic Valves with Double-Layer Elastic Poly(dimethylsiloxane) Membranes in Rigid Poly(methyl Methacrylate) Microfluidic Chips

Fabrication Of Microfluidic Chip And Its Application

A Low-Cost Method of Fabricating Hybrid Micro-Nano Fluidic Chip by Double-Layer PDMS Mold and UV–thermal Nanoimprinting

Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process

Fabrication of Poly(methyl Methacrylate)(pmma) Microfluidic Chips by a Simple Hot Embossing Method

Fabrication of PMMA Nanofluidic Electrochemical Chips with Integrated Microelectrodes.

Fabrication of SU-8 Photoresist Micro–nanofluidic Chips by Thermal Imprinting and Thermal Bonding

Thermal assisted ultrasonic bonding method for poly(methyl methacrylate) (PMMA) microfluidic devices.

Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding

Fabrication of PMMA microfluidic chips using disposable agar hydrogel templates.

Solvent Bonding of Poly(methyl Methacrylate) Microfluidic Chip Using Phase‐changing Agar Hydrogel As a Sacrificial Layer