Fabrication of Poly(methyl Methacrylate)(pmma) Microfluidic Chips by a Simple Hot Embossing Method

XG Du,YX Guan,FR Wang,ZL Fang
DOI: https://doi.org/10.3321/j.issn:0251-0790.2003.11.006
2002-01-01
Abstract:A cheap commercial pellet press was modified to perform hot embossing for the fabrication of PMMA microfluidic chips, after installing the devices for temperature control and water cooling. Nickel electroplated master molds or microfabricated silicon and glass master molds were mounted on the embossing machine together with PMMA substrates and heated from 128 degreesC to 135 degreesC, and pressed in the pressure range from 1.0-1.2 MPa for 30-60 s. After the assembly was cooled to near room temperature, the chip substrate with imprinted microchannels was removed. The complete process took about 15 min. The substrate and its PMMA cover plate were bonded at 88-95 degreesC with 0.8-1.4 MPa pressure for 10-15 min. CCD images of microchannels and SEM images of open channels on the substrates and the cross section of chips are given to show the effectiveness of the procedure. The electroosmotic flow and voltage-ampere curves of the PMMA chips corresponded to those reported in the literature. The performance of the PMMA chips is demonstrated in the electrophoretic separation of Cy5 from byproducts with a precision of 2.2% RSD(n=11) and an efficiency of 7.4x10(4) plates/m.
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