Fabrication Of Polymethyl Methacrylate Electrophoresis Chips With Integrated Copper Electrodes
Junshan Liu,Yi Luo,Yan Du,Chong Liu,Liding Wang,Weihong Zhou,Xiurong Yang
DOI: https://doi.org/10.3321/j.issn:0253-3820.2005.04.037
IF: 1.193
2005-01-01
Chinese Journal of Analytical Chemistry
Abstract:Cu was sputtered onto polymethyl methacrylate (PMMA), and copper electrodes were formed by photolithograph and wet etching; an electrophoresis chip was fabricated by thermally bonding the PMMA with copper electrodes to a PMMA substrate with microchannels. During the course of making electrodes, the temperature and time for pre-bake and hard-bake of positive photoresist on the surface of Cu were studied; the eroding solution of Cu was chosen and its concentration was analyzed; a twice-exposure method was first. put forward to remove the photoresist on copper electrodes. In order to demonstrate the feasibility of this method, cyclic and hydrodynamic voltammetry experiments were performed on a PMMA chip with copper electrodes fabricated by this method, and the electrophoresis of a glucose solution was preformed, and detected by amperometric detection.