Abstract:In this paper, we describe a novel and simple process for the fabrication of all-transparent and encapsulated polymeric nanofluidic devices using nano-indentation lithography. First, a nanomechanical probe is used to 'scratch' nanoscale channels on polymethylmethacrylate (PMMA) substrates with sufficiently high hardness. Next, polydimethylsiloxane (PDMS) is used twice to duplicate the nanochannels onto PDMS substrates from the 'nano-scratched' PMMA substrates. A number of experiments are conducted to explore the relationships between the nano-indentation parameters and the nanochannel dimensions and to control the aspect ratio of the fabricated nanochannels. In addition, traditional photolithography combined with soft lithography is employed to fabricate microchannels on another PDMS 'cap' substrate. After manually aligning the substrates, all uncovered channels on two separate PDMS substrates are bonded to achieve a sealed and transparent nanofluidic device, which makes the dimensional transition from microscale to nanoscale feasible. The smallest dimensions of the achievable nanochannels that we have demonstrated thus far are of ~20 nm depth and ~800 nm width, with lengths extendable beyond 100 μm. Fluid flow experiments are performed to verify the reliability of the device. Two types of colloidal solution are used to visualize the fluid flow through the nanochannels, that is, ethanol is mixed with gold colloid or fluorescent dye (fluorescein isothiocyanate), and the flow rate and filling time of liquid in the nanochannels are estimated based on time-lapsed image data. The simplicity of the fabrication process, bio-compatibility of the polymer substrates, and optical transparency of the nanochannels for flow visualization are key characteristics of this approach that will be very useful for nanofluidic and biomolecular research applications in the future.

Preparation of Rhombus-Shaped Micro/nanofluidic Channels with Dimensions Ranging from Hundred Nanometers to Several Micrometers.

Simple and Cost-Effective Fabrication of Two-Dimensional Plastic Nanochannels from Silica Nanowire Templates

Micro Etching Method Inside Microchannels

Design and fabrication of a nanofluidic channel by selective thermal oxidation and etching back of silicon dioxide made on a silicon substrate

Wafer-scale Fabrication of High-Aspect Ratio Nanochannels Based on Edge-Lithography Technique.

Fabrication of full glass chips with hybrid micro- and nanochannels and their application to protein concentration

Creating Sub-50 Nm Nanofluidic Junctions in PDMS Microfluidic Chip Via Self-Assembly Process of Colloidal Particles.

An experimental study on the side-opening filling process at the interface between microchannels with different widths

Self-Sealed Bionic Long Microchannels with Thin Walls and Designable Nanoholes Prepared by Line-Contact Capillary-Force Assembly

Fabrication of 1-d nanochannels on PMMA substrate by photoresist-free uv lithography and UV-assisted bonding under low temperature

Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding

Fabrication of Fluidic Chips with 1-D Nanochannels on PMMA Substrates by Photoresist-Free UV-lithography and UV-assisted Low-Temperature Bonding

Fabrication of fluidic submicron-channels by pulsed laser-induced buckling of SiOx films on fused silica

Fabrication of Micro/Nanofluidic Chip on Glass Substrate and Its Application for Electrokinetic Concentration of Proteins

Glass etching to bridge micro- and nanofluidics.

Fabrication of all-transparent polymer-based and encapsulated nanofluidic devices using nano-indentation lithography

Fabrication And Characterization Of Sub-100/10nm Planar Nanofluidic Channels By Triple Thermal Oxidation And Silicon-Glass Anodic Bonding

Fabrication of microchannels by space-selective control of phase separation in glass.

Fabrication of 1D nanofluidic channels on glass substrate by wet etching and room-temperature bonding

Novel polydimethylsiloxane (PDMS) based microchannel fabrication method for lab-on-a-chip application

Fabrication of angstrom-scale two-dimensional channels for mass transport