1.54 µm electroluminescence in SiC:Er2O3 films

Qin, G.G.,Yin, Y.,Ran, G.Z.
DOI: https://doi.org/10.1109/GROUP4.2011.6053729
2011-01-01
Abstract:SiC:Er2O3 films with different ratios of SiC to Er2O3 have been deposited on p-type Si substrates by the magnetron co-sputtering technique fully compatible with current Si processing technologies. 1.54 μm electroluminescence from the structure of indium tin oxide (ITO)/n+-Si/SiC:Er2O3/p-Si with suitable ratios of SiC to Er2O3 was measured under forward biases.
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