Electroluminescence From Indium Tin Oxide Film/Nanoscale Si Oxide/P-Si Structure

Yong-qiang Wang,Tai-ping Zhao,Xiao-ming Cui,Zhen-chang Ma,Wan-hua Zong,Guo-gang Qin
DOI: https://doi.org/10.1088/0256-307X/16/8/022
1999-01-01
Chinese Physics Letters
Abstract:After an Si oxide layer of 3 nm thickness had been grown by using magnetron sputtering on a p-type Si (100) substrate, an indium tin oxide (ITO) film was deposited onto the Si oxide layer by using electron beam deposition. Electroluminescence (EL) from such an ITO/Si oxide/p-type Si structure was measured under a forward bias of 5 V or more. Its EL power efficiency is about eight times as large as that of a semitransparent Au/Si oxide (3 nm)/p-Si structure. The experimental results indicate that the greater EL power efficiency is due not only to the higher optical transparency of the ITO film compared with Au film in a range of 300 to 900 nm, but also to some new luminescence centers introduced in the Si oxide layer during the ITO deposition process.
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