Optimization of electro-luminescence performance of silicon quantum dots based light-emitting-diode

C. Kao,Wei-Jr Tzeng
DOI: https://doi.org/10.1109/INEC.2010.5424935
2010-03-04
Abstract:Silicon quantum dots based light-emitting-diode are prepared using SiOx∼1 film as active layer and different materials as transparent electrode. SiOx film is deposited onto p-type Si substrate by e-beam evaporation and then annealed to obtain Si nano-crystals (nc-Si) embedded in SiO2. TCO materials, such as indium-tin-oxide (ITO), aluminum doped zinc oxide (AZO), and gallium doped zinc oxide (GZO), are evaporated on to the annealed SiOx film and used to be transparent electrode layer as well as n-type semiconductor of the LED. The I-V measurements and electro-luminescence are performed. The LED using 100nm SiOx∼1.1 as active layer shows a low turn-on voltage (≪ 5V). The increase of the thickness of SiOx layer leads to an augmentation of turn-on voltage which is possibly related to the tunneling effect. EL spectrum of the sample using ITO as electrode is centered at about 600 nm (orange light). Influences of the TCO layer including thickness, material, and thermal treatment are investigated.
Physics,Engineering,Materials Science
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