Atomic Nitrogen Doping And P-Type Conduction In Sno2

Shusheng Pan,Guanghai Li,Lan Wang,Yaodong D. Shen,Yixin Wang,Ting Mei,Xiao Hu
DOI: https://doi.org/10.1063/1.3258354
IF: 4
2009-01-01
Applied Physics Letters
Abstract:We report the atomic N-doped SnO2 films with p-type conduction grown via reactive sputtering at high nitrogen partial pressure. From the high-resolution x-ray photoelectron spectroscopy (XPS) and x-ray diffraction patterns, it is deduced that the N 1s with binding energy of 397 eV could be attributed to the atomic N in the SnO2 films. In addition, the results of Hall effect measurement indicate that the atomic N incorporated substitutionally at O sites act as acceptors, which is responsible for the p-type conduction of the N-doped SnO2 films. It is believed that these findings should stimulate further research on p-type SnO2 films and SnO2-based ultraviolet optoelectronic devices.
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