Fabrication of Sb-Doped p-Type ZnO Thin Films by PLD

Xinhua Pan,Zhizhen Ye,Liping Zhu,Xiuquan Gu,Haiping He
DOI: https://doi.org/10.3321/j.issn:0253-4177.2007.z1.070
2007-01-01
Journal of Semiconductors
Abstract:Antimony-doped p-type ZnO thin films were deposited on quartz substrates by pulsed laser deposition.X-ray diffraction shows that the films are highly(002)-oriented.X·ray photoelectron spectroscopy verifies that antimony(Sb)has been doped into ZnOthin films,and the core Sb occupies the Zn site but not the O site.Hall measurement shows that the best p-type ZnO film has a low resistivity of 2.21Ω·cm,a hole concentration of 2.30 x 10^18 cm-3 and a Hall mobility of 1.23cm2/(v·s).
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