P-Type Conversion of Zno Thin Films by Plasma Immersion Ion Implantation
Shuyu Zhang,Rongqing Liang,Qiongrong Ou,Xiaojing Wu,Meifu Jiang,Zongfu Nie,Feng Liu,Xijiang Chang,Yipeng Wang,Jilong Du,Peijun Wang,Qianqian Xin
DOI: https://doi.org/10.1149/1.3156835
2009-01-01
Electrochemical and Solid-State Letters
Abstract:p-Type Al-N co-doped ZnO[ZnO:(Al,N)] thin films are successfully fabricated by plasma immersion ion implantation technique assisted with co-doping method. Hole concentration, resistivity, and mobility of the optimum p-type ZnO:(Al,N) film obtained are 2.89x10(17) cm(-3), 6.87 cm, and 3.15 cm(2) V(-1) s(-1), respectively. O(*) plays an important role in the reactions of plasma for its production of N atoms. Implanted N atoms are activated by postannealing, occupy oxygen vacancies (V(O)), and form nitrogen substitutions (N(O)) at O sites.