Research of ZnO Homojeneous p-n Junction

Xiaojie Yang,Xiaoliang Xu,Jiachun Xie,Chuanming Xu,Jun Xu,Hongtu Liu
DOI: https://doi.org/10.3969/j.issn.1672-7126.2005.z1.026
2005-01-01
Abstract:ZnO homogeneous p-n junctions were fabricated by ion beam assisted deposition (IBAD) and doping of metallic Al. We found that the oxygen ratio in the reactive gaseous mixture and the if power significantly increase the formation enthalpy of the intrinsic donors (oxygency, Vo), and reduce the formation enthalpy of intrinsic acceptors (Zn vacancy, VZn, and oxygen interstitials, Vi) so as to grow p-type ZnO film. N-type ZnO film with low resistivity were grown by doping metallic Al.
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