Can Single Electron Effects Be Directly Observed in Si Quantum Dots Array at Room Temperature?

LW Yu,KJ Chen,LC Wu,M Dai,W Li,XF Huang
DOI: https://doi.org/10.1109/icsict.2004.1435090
2004-01-01
Abstract:We report a direct observation of Coulomb blockade and quantum confinement effects in the room-temperature current-voltage (I-V) characteristics of Si Quantum Dots (Si-QDs) array (with a mean diameter of 6 nm), which is embedded in the SiO2/Si-QDs array/SiO2/n(+)-Si (100) structure and elaborated in a plasma enhanced chemical vapor deposition (PECVD) system by layer-by-layer technique and in situ plasma oxidation. The IN curve exhibits a "sharp-edged bulge-like" peak structure, which differs remarkably from the peaks and the staircases reported for the case of single QD. Moreover, quantum conductance phenomenon in the IN characteristics has been found at the onsets of the peaks in the I-V characteristics.
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