Solid Source Molecular Beam Epitaxy Growth of InAsP Using As2 and As4 Modes

任在元,郝智彪,何为,罗毅
DOI: https://doi.org/10.3969/j.issn.1674-4926.2002.01.013
2002-01-01
Abstract:Growth properties of As2 and As4 mode based upon a home-made MBE system are reported. High quality InAsP bulk film and InAsyP1-y/InP quantum wells are grown on (001) InP substrate under As2 and As4 modes, respectively. X-ray diffraction (XRD) measurements and simulations reveal the high structural quality of the samples grown under both As2 and As4 modes, while the adsorption efficiency of As2 is found to be higher than that of As4. The optical properties of samples are measured by room temperature and 10 K photoluminescence (PL). The room temperature PL properties of samples grown using As2 mode in the whole composition range are obviously improved compared with the samples grown using As4 mode, but the 10 K PL properties are comparable. The difference is attributed to the different quantity of defects introduced into the epilayers during the growth because of the relatively complicated growth mechanism of As4 mode.
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