Experimental research on scanning performance of four-segmented PZT tube

Xiumei Liu,Jia Wang,Dacheng Li
DOI: https://doi.org/10.1117/12.318156
1998-01-01
Abstract:A four-segmented piezoelectric tube performs XYZ spatial scanning in a SPM (Scanning Probe Microscopy) system. The measurement of characteristics including scanning range, accuracy, linearity and the lowest resonant frequency are essential to obtain an reliable image and get information about the scanning velocity. An optical fiber laser interferometer capable of vibration measurement is used to characterize the scanning tube with the inner diameter of 6mm, thickness 1mm and length 25mm is measured. We find that the lowest resonant frequency is much lower than the calculated result. The low resonant frequency will limit the scanning velocity and influence the quality of the obtained image greatly. In addition, the nonlinearity curve can be obtained by driving the scanning tube with a triangle wave slowly. The measurement is easy, quick and continuous. In addition, we measure the non-linearity statically by inductive micrometer as well. The two results are compared. The result shows that there is difference between them.
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