Electric characteristics of PZTA and its driving system

Xiaowu Shu

1998-01-01

Abstract:The electric characteristics of piezoelectric optical angle scanner (PZTA) and its influence on the scanning quality were analyzed in detail. A driving electric circuit of PZTA was designed to realize large angle of scanning. With this circuit, PZTA can scan more than 3° under low temperature environment (100 K). The scanning frequency is 20 Hz.

What problem does this paper attempt to address?

The Characteristics of PZTA and Its Controlling System

Xiaowu Shu

1998-01-01

Abstract:In this paper,The mechanical characteristics of piezoelectric optical angle scanner(PZTA) and its influence on the scanning quality is detailed. With the computer controlling, we can get high scanning quality by adjusting the input signal style. PZTA can scan more than 3°under ultra-cold environment (100K). The scanning frequency is up to 20Hi and linear is 1 %.
Large-angle and ultra-cold scanner

Xiaowu Shu,Cheng Liu,Weidang Zhao,Guoguang Yang

1998-01-01

Abstract:The theoretical characteristics and the manufacture technique of a novel piezoelectric optical angle scanner (PZTA) are presented in this paper. On the base of PZT's "anti-piezoelectric effect", a new optical scanner that can be used in ultra-cold environment has been developed.
Features Of The Piezo-Phototronic Effect On Optoelectronic Devices Based On Wurtzite Semiconductor Nanowires

Qing Yang,Yuanpeng Wu,Ying Liu,Caofeng Pan,Zhong Lin Wang

DOI: https://doi.org/10.1039/c3cp53737d

IF: 3.3

2014-01-01

Physical Chemistry Chemical Physics

Abstract:The piezo-phototronic effect, a three way coupling effect of piezoelectric, semiconductor and photonic properties in non-central symmetric semiconductor materials, utilizing the piezo-potential as a "gate'' voltage to tune the charge transport/generation/recombination and modulate the performance of optoelectronic devices, has formed a new field and attracted lots of interest recently. The mechanism was verified in various optoelectronic devices such as light emitting diodes (LEDs), photodetectors and solar cells etc. The fast development and dramatic increasing interest in the piezo-phototronic field not only demonstrate the way the piezo-phototronic effects work, but also indicate the strong need for further research in the physical mechanism and potential applications. Furthermore, it is important to distinguish the contribution of the piezo-phototronic effect from other factors induced by external strain such as piezoresistance, band shifting or contact area change, which also affect the carrier behaviour and device performance. In this perspective, we review our recent progress on piezo-phototronics and especially focus on pointing out the features of piezo-phototronic effect in four aspects: I-V characteristics; c-axis orientation; influence of illumination; and modulation of carrier behaviour. Finally we proposed several criteria for describing the contribution made by the piezo-phototronic effect to the performance of optoelectronic devices. This systematic analysis and comparison will not only help give an in-depth understanding of the piezo-phototronic effect, but also work as guide for the design of devices in related areas.
Measurement Accuracy Improvement With Pzt Scanning For Detection Of Dpc In Hi-Bi Fibers

Wencai Jing,Yimo Zhang,Ge Zhou,Feng Tang,Haifeng Li

DOI: https://doi.org/10.1364/OE.10.000685

IF: 3.8

2002-01-01

Optics Express

Abstract:Piezo-electronic transducer is used in combination with mechanical scanning devices to improve measurement accuracy in a distributed polarization coupling detection system. For mechanical scanning range of 150 mm with 200-nm resolution, the measurement error of polarization-coupling intensity can be improved from 38% to 2% in combination with a 20-nm resolution piezo-electronic transducer. (C) 2002 Optical Society of America.
Experimental research on scanning performance of four-segmented PZT tube

Xiumei Liu,Jia Wang,Dacheng Li

DOI: https://doi.org/10.1117/12.318156

1998-01-01

Abstract:A four-segmented piezoelectric tube performs XYZ spatial scanning in a SPM (Scanning Probe Microscopy) system. The measurement of characteristics including scanning range, accuracy, linearity and the lowest resonant frequency are essential to obtain an reliable image and get information about the scanning velocity. An optical fiber laser interferometer capable of vibration measurement is used to characterize the scanning tube with the inner diameter of 6mm, thickness 1mm and length 25mm is measured. We find that the lowest resonant frequency is much lower than the calculated result. The low resonant frequency will limit the scanning velocity and influence the quality of the obtained image greatly. In addition, the nonlinearity curve can be obtained by driving the scanning tube with a triangle wave slowly. The measurement is easy, quick and continuous. In addition, we measure the non-linearity statically by inductive micrometer as well. The two results are compared. The result shows that there is difference between them.
Design And Optimization Of Micro Scanner Driven By Folded Piezoelectric Unimorph Actuators Using Pzt Films

Huajun Fang,Litian Liu,Xiaoming Wu,Ningxin Zhang,Tianling Ren

DOI: https://doi.org/10.1080/10584580500413384

2005-01-01

Integrated Ferroelectrics

Abstract:A microscanner actuated by folded piezoelectric unimorph actuators using PZT thin films is designed and optimized to obtain large scanning angle with low driving voltage and stable mechanical performance. The micro scanner consists of two piezoelectric folded cantilever microactuators and a planar micromirror between the microactuators. Each actuator consists of several multilayer cantilevers in series. The device structure and fabrication process are presented and the mechanical performance of the microscanner is simulated and optimized. The deflecting angle of the piezoelectrically actuated microscanner with respect to applied voltage and structural parameters are investigated. With large tilting angle, small chip size and low power dissipation, the piezoelectrically actuated microscanner is expected to be promising for wide scanning applications.
Fiber Grating Sensor Using Dynamic PZT Modulation

Qiang Li

2002-01-01

Abstract:A new type technology of dynamic PZT modulation with fiber grating is proposed. It can change measure of wvelength shift with optical spectrum analyzes to count of optical power pulse detecting by oscilloscope. The technology is investigated theoretically and experimentally. The PZT is modulated by periodicity voltage and the fiber grating fixing on the it is also modulated by PZT. The measured resolutions in experiment are good agreement with ones in theory.
Study of piezo-induced surface vibration in solids using atomic force probe

Fanghao Li,Dongxian Zhang,Haijun Zhang

DOI: https://doi.org/10.4028/www.scientific.net/KEM.562-565.1214

2013-01-01

Key Engineering Materials

Abstract:Piezo-induced surface vibrations in solids with nanometer amplitude are detected and analyzed. The vibrations are excited by the piezo element using a PZT component, which attached to the target material and controlled by a signal generator. The detections of such vibrations are carried out using the atomic force probe (APP). The APP is a very sensitive instrument utilizing a nano-tip connected to a cantilever to detect vibrations through an interaction of atomic force between the tip and the target surface with sub-nanometer resolution, about 30 times more precise than the piezoelectric sensor for the same signal detection. The glass material has been chosen as the target solid. The enhancement effect of the vibrations in the glass slice around resonance frequency is confirmed, the maximum amplitude appears at 7.4 kHz. The piezo-induced vibration will be employed in our future research for developing piezo-induced and laser-induced surface acoustic wave (SAW) motor.
PYROELECTRIC AND THERMAL STRAIN EFFECTS OF PIEZOELECTRIC (PVDF AND PZT) DEVICES

HS Tzou,R Ye

DOI: https://doi.org/10.1006/mssp.1996.0032

IF: 8.4

1996-01-01

Mechanical Systems and Signal Processing

Abstract:Piezoelectric devices respond to temperature variations in a changing temperature environment. The temperature-induced voltage generation of piezoelectric sensors can be further divided into two major components: the pyroelectric effect and the thermal strain effect. In this study, these two temperature-induced components of distributed piezoelectric polyvinylidene fluoride (PVDF) and lead-zirconate-titanate (PZT) sensors are compared using a new 3-D thin piezothermoelastic solid finite element. A piezoelectric laminated square plate is used in a case study. Analyses suggest that the pyroelectric effect of PVDF sensors is much more prominent than the thermal strain effect. However, the PZT sensors exhibit the opposite phenomena. Distributed control of the plate with a temperature-induced deflection is also demonstrated.
Two-Dimensional Optical Scanning of A Piezoelectric Cantilever Actuator

Xiangcheng Chu,Long Ma,Songmei Yuan,Mengkai Li,Longtu Li

DOI: https://doi.org/10.1007/s10832-007-9292-2

2007-01-01

Journal of Electroceramics

Abstract:A piezoelectric optical scanning cantilever structure with two-dimensional scanning angles was reported. The theoretical and experimental studies on the structure were carried out. By using finite element method, the effect of the materials and the structure size on the theoretical results were concluded, and a favorable two-dimensional piezoelectric optical scanning structure with a single cantilever was obtained. A two-dimensional piezoelectric optical scanning specimen was fabricated. It was found that a 0.282° bending scanning angle at 1056 Hz and a 0.12° torsional scanning angle at 4612 Hz were obtained under the forcing voltage of 5 V (o–p).
A Multi-Mode Self-Centering Piezo Actuator: Design, Analysis and Its Application in Full-Stroke Microscopic Imaging

Guangda Qiao,Ziyue Zhang,Guofang Gong,Huayong Yang,Dong Han

DOI: https://doi.org/10.1016/j.ymssp.2024.111963

IF: 8.4

2025-01-01

Mechanical Systems and Signal Processing

Abstract:Parasitic piezo dive is a primary method for cross-scale positioning, which can adjust the locking force appropriately to increase the service life but bring radial fluctuations, backward motion, and bi-directional inconsistency issues. In this work, a multi-mode self-centering piezo actuator is proposed, a theoretical analysis model of the transmission mechanism is established, and parameterized design is conducted using the finite element method. The actuator features normal pressure adjustment, parallel drive, parasitic drive, and rectangular drive modes. Under the first mode, a bias voltage of 50 Vp-p achieved a locking force adjustment of 2.5 N. Furthermore, the characteristics of the remaining modes were compared. It was observed that the parallel trajectory drive mode exhibited a higher velocity of 31.68 mm/s, while the rectangular trajectory drive mode suppressed the backward motion to achieve smooth driving, with a linear correlation coefficient R-2 of the displacement reaching 0.9999. Compared to the traditional parasitic actuator, the radial fluctuations in these two drive modes were reduced by up to 98.4 %, and the bidirectional consistency were improved to 97 %. Finally, we completed convenient imaging of various specimens across the full-stroke of microscopes by integrated circuit design and Bluetooth communication on mobile phones.
Compound Three-dimensional Piezoelectric Scanner Used in Scanning Probe Microscopy

Tao HONG,Jia WANG,Xiu-mei LIU,Lin DING

DOI: https://doi.org/10.3969/j.issn.1004-2474.2000.01.010

2000-01-01

Abstract:The piezoelectric scanner is one of the key components of scanning probe microscope. A compound three-dimensional piezoelectric scanner has been designed and constructed. The performances of piezoelectric scanner have been investigated. Impelled by the voltage of 400 V,the scanner achieves a scanning range of 13μm×13 pm. The nonlinearity of x.y direction and z direction is less than 0. 36% and 0. 14% respectively. This kind of scanner has been used in the system of scanning near field optical microscope.
On the Design of Piezoelectric actuator for 1D MEMS scanning mirror applications

Shih-Chi Liu,Hao-Chien Cheng,Si-Han Chen,Hung-Yu Lin,Chih-Chen Hsu,Fuchi Shih,Kai-Chih Liang,Mingching Wu,Weileun Fang

DOI: https://doi.org/10.1088/1361-6439/acb4a2

2023-01-20

Journal of Micromechanics and Microengineering

Abstract:This study presents the design, implementation, and characterization of 1D resonant type micro-electro-mechanical-systems piezoelectric scanning mirrors with different actuator designs to investigate their influences on the figure of merits (FoM) for automotive LiDAR application. The MEMS scanning mirrors are driven by PZT thin film in this study owing to its outstanding piezoelectric properties. Three different beam-type piezoelectric actuators are designed, including the reference meander straight-beam actuator design, and the proposed meander curved-beam and straight-curved tapered beam actuator designs. Simulations show the scan angle enhancement for two proposed designs, yet the resonant scanning frequency of meander curved-beam design dropped to below the 2 kHz requirement. To evaluate the designs, scanning mirrors with two proposed actuators are fabricated and tested. Measurements show that the resonant frequencies for the two proposed MEMS scanning mirrors are 1735 Hz and 2578 Hz, respectively. Two proposed designs respectively have the maximum optical angles of 48.1° and 50.6° at the 20 Vpp driving voltage. Due to the much higher stress on the beam structure induced by the misalignment of PZT film, the actuator could not reach the predicted scanning angle of near 80°. In comparison of the two proposed designs, the straight-curved tapered beam actuator design could enhance the FoM for about 56%. In summary, the performances of piezoelectric MEMS scanning mirror can be improved by varying the designs of length and shape of actuator, and the distribution of PZT film on the suspended actuator is also a critical design concern.

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Excellent Uniformity and Properties of Micro-Meter Thick Lead Zirconate Titanate Coatings with Rapid Thermal Annealing

Youcao Ma,Jian Song,Yuyao Zhao,Kiyotaka Tanaka,Shijunbo Wu,Chao Dong,Xubo Wang,Isaku Kanno,Jun Ouyang,Jia Zhou,Yue Liu

DOI: https://doi.org/10.3390/ma16083185

IF: 3.4

2023-04-19

Materials

Abstract:Lead zirconate titanate (PZT) films have shown great potential in piezoelectric micro-electronic-mechanical system (piezo-MEMS) owing to their strong piezoelectric response. However, the fabrication of PZT films on wafer-level suffers with achieving excellent uniformity and properties. Here, we successfully prepared perovskite PZT films with similar epitaxial multilayered structure and crystallographic orientation on 3-inch silicon wafers, by introducing a rapid thermal annealing (RTA) process. Compared to films without RTA treatment, these films exhibit (001) crystallographic orientation at certain composition that expecting morphotropic phase boundary. Furthermore, dielectric, ferroelectric and piezoelectric properties on different positions only fluctuate within 5%. The relatively dielectric constant, loss, remnant polarization and transverse piezoelectric coefficient are 850, 0.1, 38 μC/cm2 and −10 C/m2, respectively. Both uniformity and properties have reached the requirement for the design and fabrication of piezo-MEMS devices. This broadens the design and fabrication criteria for piezo-MEMS, particularly for piezoelectric micromachined ultrasonic transducers.

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,metallurgy & metallurgical engineering
3.8×3.8 mm2 Tiny Piezoelectric Resonant MEMS Scanner Using Fork-Shaped and Ring-Shaped Actuators

Hironao Okada,Yusuke Takei,Yuki Okamoto,S. Gorwadkar

DOI: https://doi.org/10.1109/MEMS58180.2024.10439483

2024-01-21

Abstract:We developed a 3.8×3.8 mm2 tiny resonant piezoelectric MEMS scanner with a 1.0-mm mirror using double coupling frames. The proposed scanner utilizes the mechanical coupling of two Pb(Zr,Ti)O3 (PZT) piezoelectric actuators: fork-shaped and ring-shaped actuators. The proposed two-actuator design increases the efficiency of area usage for driving actuators per die and improves the resonant frequency owing to the mechanical coupling of the two actuators. Besides, the proposed design reduces mechanical stress by making the operating scanning frequency higher than the other scanning modes. The resonant frequency of the proposed scanner is 27.09 kHz, and the optical scan angle is 40 degrees with a unipolar driving voltage of 25.2 V.

Materials Science,Engineering
A Two-Dimensional Micro Scanner Integrated With A Piezoelectric Actuator And Piezoresistors

Chi Zhang,Gaofei Zhang,Zheng You

DOI: https://doi.org/10.3390/s90100631

IF: 3.9

2009-01-01

Sensors

Abstract:A compact two-dimensional micro scanner with small volume, large deflection angles and high frequency is presented and the two-dimensional laser scanning is achieved by specular reflection. To achieve large deflection angles, the micro scanner excited by a piezoelectric actuator operates in the resonance mode. The scanning frequencies and the maximum scanning angles of the two degrees of freedom are analyzed by modeling and simulation of the structure. For the deflection angle measurement, piezoresistors are integrated in the micro scanner. The appropriate directions and crystal orientations of the piezoresistors are designed to obtain the large piezoresistive coefficients for the high sensitivities. Wheatstone bridges are used to measure the deflection angles of each direction independently and precisely. The scanner is fabricated and packaged with the piezoelectric actuator and the piezoresistors detection circuits in a size of 28 mm x 20 mm x 18 mm. The experiment shows that the two scanning frequencies are 216.8 Hz and 464.8 Hz, respectively. By an actuation displacement of 10 mu m, the scanning range of the two-dimensional micro scanner is above 26 degrees x 23 degrees. The deflection angle measurement sensitivities for two directions are 59 mV/deg and 30 mV/deg, respectively.
Design of two-dimensional piezoelectric laser scanner system for precision laser beam steering

Dong Luo,Xiaogang Xiong,Wei Chen,Ruining Huang

DOI: https://doi.org/10.1063/5.0138139

2023-10-01

Abstract:In this work, a large aperture two-dimensional (2D) piezoelectric laser scanner system with an onboard sensor to detect the scanner's deflection angle has been designed and prototyped. The proposed 2D laser scanner is driven using three amplified piezoelectric actuators assembled in an equilateral triangle configuration to provide structural stability and compactness. To overcome the nonlinearity that derives from the hysteresis effect of the piezoelectric actuators, the tip-tilt principle and the control schemes of the 2D scanner are analyzed and compared. Thanks to the combination of onboard sensing of the deflection angle of the scanner with the closed-loop control capability, this 2D scanner's features include a large aperture and high accuracy. The experimental results demonstrate that closed-loop control achieves higher control accuracy than the open-loop control approach, leading to a reduction in the relative error from 2%-4% to ∼0.5%, while the deflection angle tracking accuracy lies approximately within the 40 μrad range.
3.8×3.8 mm2 compact piezoelectric resonant MEMS scanner using fork-shaped and ring-shaped actuators

Yuki Okamoto,Rihachiro Nakashima,Ryo Oda,Sucheta Gorwadkar,Yusuke Takei,Hironao Okada

DOI: https://doi.org/10.1088/1361-6439/ad72fe

2024-08-26

Journal of Micromechanics and Microengineering

Abstract:This study presents a compact 3.8×3.8 mm2 resonant piezoelectric micro-electro-mechanical systems (MEMS) scanner featuring a 1.0-mm mirror and double-coupling frames. It employs a novel mechanical coupling of two Pb(Zr,Ti)O3 (PZT) piezoelectric actuators—fork-shaped and ring-shaped. This dual-actuator configuration enhances the efficiency of actuator area usage per die and significantly improves the resonant frequency through their mechanical coupling. Additionally, the design strategy effectively reduces mechanical stress by operating the scanning frequency above those of other modes. The resonant frequency achieved by the proposed scanner is 27.09 kHz, with an optical scan angle of 40◦, utilizing a unipolar driving voltage of 25.2 V.

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Wide Angle and High Frequency Resonant Piezoelectric MEMS Mirror for Laser Beam Scanning Application

Hung-Yu Lin,Hao-Chien Cheng,Shih-Chi Liu,Chih-Chen Hsu,Si-Han Chen,Mingching Wu,Kai-Chih Liang,Mei-Feng Lai,Weileun Fang

2023-01-01

Abstract:This study designs and realizes a piezoelectric MEMS scanning mirror with large scan angle and high frequency for high-resolution laser beam scanning displays. In Fig. 1 a, this design has three merits: (1) wing-shaped actuators: to serve as the pure torque generator to drive the torsional spring and mirror (1.2mm) with good linearity (since no axial/transverse loads), (2) wing-shaped actuators: to localize the energy at torsional-spring and mirror to achieve large scan angle (at the scanning mode); (3) optimal supporting spring: to suppress the mode coupling and further to lower the stress during scanning. Thus, large scan angle at high scanning frequency is achieved. Measurements demonstrate the scanner has an optical scan angle of 70-degree (mechanical scan angle of ±17.5-degree) at the resonant frequency of 37.7kHz (no vacuum required), which can reach target resolution 1080P, with a unipolar driving voltage of 20V. As summarized in Fig. 7, compared with existing scanners, the performance of the presented one is competitive in FOM (optical scan angle (θ) × mirror size (D)) when driving at resonant frequency.
Dielectric, Piezoelectric and Dc Bias Characteristics of Bi-doped PZT Multilayer Ceramic Actuator

Shuhao Yan,Chaochao Sun,Qianyue Cui,Mingzhe He,Willhandy,Ruanbin Wang,Junjie Hao,Xiangcheng Chu

DOI: https://doi.org/10.1016/j.matchemphys.2020.123605

IF: 4.778

2020-01-01

Materials Chemistry and Physics

Abstract:In this study, the microstructure, dielectric, piezoelectric and de bias properties of the Bi-doped PZT (PZTB) multilayer piezoelectric actuators, have been discussed. The thickness of the dielectric monolayer was about 70 mu m, and a relatively uniform distribution of the grain size was developed. The application of a large de bias field resulted in a decrease in the dielectric constant and dielectric loss of the multilayer piezoelectric ceramics. The shift of the Curie temperature (T-c) towards a higher value and stabilized temperature-dependent dielectric properties were observed under the de bias field. The increase in parameter y suggested the enhancement of the degree of diffuseness of the phase transition. The large displacement reached 0.11% of the thickness of the multilayer piezoelectric ceramic under a low driving voltage of 150 V, indicating the potential of commercial applications of the studied multilayer piezoelectric actuators. This study provides specific experimental data to evaluate the practical application of the Bi-doped PZT multilayer piezoelectric actuators.

Electric characteristics of PZTA and its driving system

The Characteristics of PZTA and Its Controlling System

Large-angle and ultra-cold scanner

Features Of The Piezo-Phototronic Effect On Optoelectronic Devices Based On Wurtzite Semiconductor Nanowires

Measurement Accuracy Improvement With Pzt Scanning For Detection Of Dpc In Hi-Bi Fibers

Experimental research on scanning performance of four-segmented PZT tube

Design And Optimization Of Micro Scanner Driven By Folded Piezoelectric Unimorph Actuators Using Pzt Films

Fiber Grating Sensor Using Dynamic PZT Modulation

Study of piezo-induced surface vibration in solids using atomic force probe

PYROELECTRIC AND THERMAL STRAIN EFFECTS OF PIEZOELECTRIC (PVDF AND PZT) DEVICES

Two-Dimensional Optical Scanning of A Piezoelectric Cantilever Actuator

A Multi-Mode Self-Centering Piezo Actuator: Design, Analysis and Its Application in Full-Stroke Microscopic Imaging

Compound Three-dimensional Piezoelectric Scanner Used in Scanning Probe Microscopy

On the Design of Piezoelectric actuator for 1D MEMS scanning mirror applications

Excellent Uniformity and Properties of Micro-Meter Thick Lead Zirconate Titanate Coatings with Rapid Thermal Annealing

3.8×3.8 mm2 Tiny Piezoelectric Resonant MEMS Scanner Using Fork-Shaped and Ring-Shaped Actuators

A Two-Dimensional Micro Scanner Integrated With A Piezoelectric Actuator And Piezoresistors

Design of two-dimensional piezoelectric laser scanner system for precision laser beam steering

3.8×3.8 mm2 compact piezoelectric resonant MEMS scanner using fork-shaped and ring-shaped actuators

Wide Angle and High Frequency Resonant Piezoelectric MEMS Mirror for Laser Beam Scanning Application

Dielectric, Piezoelectric and Dc Bias Characteristics of Bi-doped PZT Multilayer Ceramic Actuator