The Characteristics of PZTA and Its Controlling System

Xiaowu Shu

1998-01-01

Abstract:In this paper,The mechanical characteristics of piezoelectric optical angle scanner(PZTA) and its influence on the scanning quality is detailed. With the computer controlling, we can get high scanning quality by adjusting the input signal style. PZTA can scan more than 3°under ultra-cold environment (100K). The scanning frequency is up to 20Hi and linear is 1 %.

What problem does this paper attempt to address?

Electric characteristics of PZTA and its driving system

Xiaowu Shu

1998-01-01

Abstract:The electric characteristics of piezoelectric optical angle scanner (PZTA) and its influence on the scanning quality were analyzed in detail. A driving electric circuit of PZTA was designed to realize large angle of scanning. With this circuit, PZTA can scan more than 3° under low temperature environment (100 K). The scanning frequency is 20 Hz.
Large-angle and ultra-cold scanner

Xiaowu Shu,Cheng Liu,Weidang Zhao,Guoguang Yang

1998-01-01

Abstract:The theoretical characteristics and the manufacture technique of a novel piezoelectric optical angle scanner (PZTA) are presented in this paper. On the base of PZT's "anti-piezoelectric effect", a new optical scanner that can be used in ultra-cold environment has been developed.
Measurement Accuracy Improvement With Pzt Scanning For Detection Of Dpc In Hi-Bi Fibers

Wencai Jing,Yimo Zhang,Ge Zhou,Feng Tang,Haifeng Li

DOI: https://doi.org/10.1364/OE.10.000685

IF: 3.8

2002-01-01

Optics Express

Abstract:Piezo-electronic transducer is used in combination with mechanical scanning devices to improve measurement accuracy in a distributed polarization coupling detection system. For mechanical scanning range of 150 mm with 200-nm resolution, the measurement error of polarization-coupling intensity can be improved from 38% to 2% in combination with a 20-nm resolution piezo-electronic transducer. (C) 2002 Optical Society of America.
Cutting Temperature and Force Data Acquisition and Measuring System Design in High Speed Machining

Xiaofeng Zheng,Qiyong Zeng,Kai Wu,Zhonghua Yu,Xiaotong Li

DOI: https://doi.org/10.1109/icmtma.2010.774

2010-01-01

Abstract:In order to measure the dynamic cutting temperature in high speed machining, a new method to prepare multi-layer thin film thermocouple sensor on a ceramic tool was presented. the sensor was fabricated on the ceramic tool’s rake face with the technology of magnetron sputtering, lithography, and plasma enhanced chemical vapor deposition (PECVD) methods. The preparation process of the multi-player thin films was expatiated. The high speed cutting temperature and cutting force data acquisition and measuring system was designed. The type of data acquisition card is ADlink PCI-9118HG. Simple and friendly human-machine interface was programmed with the application of VC++ technology and Tchart controllor to achieve real-time data acquisition, display and analysis of high-speed cutting temperature and cutting force. It was concluded from the experiment that the data acquisition and measuring system is easy and flexible to use.
Experimental research on scanning performance of four-segmented PZT tube

Xiumei Liu,Jia Wang,Dacheng Li

DOI: https://doi.org/10.1117/12.318156

1998-01-01

Abstract:A four-segmented piezoelectric tube performs XYZ spatial scanning in a SPM (Scanning Probe Microscopy) system. The measurement of characteristics including scanning range, accuracy, linearity and the lowest resonant frequency are essential to obtain an reliable image and get information about the scanning velocity. An optical fiber laser interferometer capable of vibration measurement is used to characterize the scanning tube with the inner diameter of 6mm, thickness 1mm and length 25mm is measured. We find that the lowest resonant frequency is much lower than the calculated result. The low resonant frequency will limit the scanning velocity and influence the quality of the obtained image greatly. In addition, the nonlinearity curve can be obtained by driving the scanning tube with a triangle wave slowly. The measurement is easy, quick and continuous. In addition, we measure the non-linearity statically by inductive micrometer as well. The two results are compared. The result shows that there is difference between them.
Study on technology of zinc oxide piezoelectric thin film device with surface micromachining substrate

Zhonghe Jin,Xiaoming Chen,Yingyin Zou

1994-01-01

Abstract:The zinc oxide piezoelectric thin film device with surface micromachining substrate has multifunction which can realize minimization and integration. The surface micromachining technique and the effect of the manufacturing process of this device on the substrate were studied so that the deformation of such structure can be prevented. The C-axis oriented zinc oxide thin film was prepared by using magnetron sputtering on a polysilicon membrane, from which the relations among the growth quality, sputtering power, gas pressure and substrate temeprature were discussed for determining the optimum technology of the thin film.
Design of two-dimensional piezoelectric laser scanner system for precision laser beam steering

Dong Luo,Xiaogang Xiong,Wei Chen,Ruining Huang

DOI: https://doi.org/10.1063/5.0138139

2023-10-01

Abstract:In this work, a large aperture two-dimensional (2D) piezoelectric laser scanner system with an onboard sensor to detect the scanner's deflection angle has been designed and prototyped. The proposed 2D laser scanner is driven using three amplified piezoelectric actuators assembled in an equilateral triangle configuration to provide structural stability and compactness. To overcome the nonlinearity that derives from the hysteresis effect of the piezoelectric actuators, the tip-tilt principle and the control schemes of the 2D scanner are analyzed and compared. Thanks to the combination of onboard sensing of the deflection angle of the scanner with the closed-loop control capability, this 2D scanner's features include a large aperture and high accuracy. The experimental results demonstrate that closed-loop control achieves higher control accuracy than the open-loop control approach, leading to a reduction in the relative error from 2%-4% to ∼0.5%, while the deflection angle tracking accuracy lies approximately within the 40 μrad range.
Design And Optimization Of Micro Scanner Driven By Folded Piezoelectric Unimorph Actuators Using Pzt Films

Huajun Fang,Litian Liu,Xiaoming Wu,Ningxin Zhang,Tianling Ren

DOI: https://doi.org/10.1080/10584580500413384

2005-01-01

Integrated Ferroelectrics

Abstract:A microscanner actuated by folded piezoelectric unimorph actuators using PZT thin films is designed and optimized to obtain large scanning angle with low driving voltage and stable mechanical performance. The micro scanner consists of two piezoelectric folded cantilever microactuators and a planar micromirror between the microactuators. Each actuator consists of several multilayer cantilevers in series. The device structure and fabrication process are presented and the mechanical performance of the microscanner is simulated and optimized. The deflecting angle of the piezoelectrically actuated microscanner with respect to applied voltage and structural parameters are investigated. With large tilting angle, small chip size and low power dissipation, the piezoelectrically actuated microscanner is expected to be promising for wide scanning applications.
PYROELECTRIC AND THERMAL STRAIN EFFECTS OF PIEZOELECTRIC (PVDF AND PZT) DEVICES

HS Tzou,R Ye

DOI: https://doi.org/10.1006/mssp.1996.0032

IF: 8.4

1996-01-01

Mechanical Systems and Signal Processing

Abstract:Piezoelectric devices respond to temperature variations in a changing temperature environment. The temperature-induced voltage generation of piezoelectric sensors can be further divided into two major components: the pyroelectric effect and the thermal strain effect. In this study, these two temperature-induced components of distributed piezoelectric polyvinylidene fluoride (PVDF) and lead-zirconate-titanate (PZT) sensors are compared using a new 3-D thin piezothermoelastic solid finite element. A piezoelectric laminated square plate is used in a case study. Analyses suggest that the pyroelectric effect of PVDF sensors is much more prominent than the thermal strain effect. However, the PZT sensors exhibit the opposite phenomena. Distributed control of the plate with a temperature-induced deflection is also demonstrated.
Excellent Uniformity and Properties of Micro-Meter Thick Lead Zirconate Titanate Coatings with Rapid Thermal Annealing

Youcao Ma,Jian Song,Yuyao Zhao,Kiyotaka Tanaka,Shijunbo Wu,Chao Dong,Xubo Wang,Isaku Kanno,Jun Ouyang,Jia Zhou,Yue Liu

DOI: https://doi.org/10.3390/ma16083185

IF: 3.4

2023-04-19

Materials

Abstract:Lead zirconate titanate (PZT) films have shown great potential in piezoelectric micro-electronic-mechanical system (piezo-MEMS) owing to their strong piezoelectric response. However, the fabrication of PZT films on wafer-level suffers with achieving excellent uniformity and properties. Here, we successfully prepared perovskite PZT films with similar epitaxial multilayered structure and crystallographic orientation on 3-inch silicon wafers, by introducing a rapid thermal annealing (RTA) process. Compared to films without RTA treatment, these films exhibit (001) crystallographic orientation at certain composition that expecting morphotropic phase boundary. Furthermore, dielectric, ferroelectric and piezoelectric properties on different positions only fluctuate within 5%. The relatively dielectric constant, loss, remnant polarization and transverse piezoelectric coefficient are 850, 0.1, 38 μC/cm2 and −10 C/m2, respectively. Both uniformity and properties have reached the requirement for the design and fabrication of piezo-MEMS devices. This broadens the design and fabrication criteria for piezo-MEMS, particularly for piezoelectric micromachined ultrasonic transducers.

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,metallurgy & metallurgical engineering
Study on the computer control system for the piezoelectric traveling-wave motor

Shuxin Wang,Shuxiang Dong,Xiaoyong Wei,Longtu Li

1996-01-01

Abstract:An introduction was made on the computer control system for the piezoelectric traveling-wave motor with emphasis put on introducing its control principle, and the circuit for control. The experimental results show that under the control of our software, the piezoelectric traveling-wave motor can be operated with any step program of angle/time, in which, the step-angle can vary from 0.15��/step to any value, and a high resolution of angle is realized with far low-cost. Besides, this computer control system also has the function of testing that makes it possible to measure the dynamic operation curves of the ultrasonic motor, in this way, the system also provides a powerful tool for researching or improving the motor performances.
Analysis of Dynamic Characteristics of Focusing System Based on PZT Micro-Actuator

YAN Wei,LIANG Yi-yong,YANG Guo-guang

DOI: https://doi.org/10.3969/j.issn.1005-5630.2006.02.012

2006-01-01

Abstract:To improve the focusing systematic stability and response speed of the laser direct writing system,a reasonable modeling for strength and displacement relation of the micro-actuator,which is the executive body in the focusing system,was proposed based on elastic mechanics.Full analysis of the dynamic response characteristics have been done,which provides a theoretic evidence for PID adjustment.It focuses on differentiation in PID adjustment,amends the phase lag problem and gets better systematic stability and response speed.Experience on the laser direct writing system,we got that the precision of the focusing system is 0.2μm.
Compound Three-dimensional Piezoelectric Scanner Used in Scanning Probe Microscopy

Tao HONG,Jia WANG,Xiu-mei LIU,Lin DING

DOI: https://doi.org/10.3969/j.issn.1004-2474.2000.01.010

2000-01-01

Abstract:The piezoelectric scanner is one of the key components of scanning probe microscope. A compound three-dimensional piezoelectric scanner has been designed and constructed. The performances of piezoelectric scanner have been investigated. Impelled by the voltage of 400 V,the scanner achieves a scanning range of 13μm×13 pm. The nonlinearity of x.y direction and z direction is less than 0. 36% and 0. 14% respectively. This kind of scanner has been used in the system of scanning near field optical microscope.
Two-Dimensional Optical Scanning of A Piezoelectric Cantilever Actuator

Xiangcheng Chu,Long Ma,Songmei Yuan,Mengkai Li,Longtu Li

DOI: https://doi.org/10.1007/s10832-007-9292-2

2007-01-01

Journal of Electroceramics

Abstract:A piezoelectric optical scanning cantilever structure with two-dimensional scanning angles was reported. The theoretical and experimental studies on the structure were carried out. By using finite element method, the effect of the materials and the structure size on the theoretical results were concluded, and a favorable two-dimensional piezoelectric optical scanning structure with a single cantilever was obtained. A two-dimensional piezoelectric optical scanning specimen was fabricated. It was found that a 0.282° bending scanning angle at 1056 Hz and a 0.12° torsional scanning angle at 4612 Hz were obtained under the forcing voltage of 5 V (o–p).
Computer controlled measurement and data acquisition system for piezoelectric crystal sensor array

Wei Pan,Hongquan Liu,Wanli Xing,Xiwen He

1997-01-01

Abstract:A computer controlled intelligent measurement and data acquisition system for piezoelectric crystal sensor array was studied. The function and structure of the hardware and the software for data acquisition were introduced. This instrument has high precision and stability. The number of piezoelectric crystal sensors measured can be varied from one to twelve. The on-line observation of frequency shift may be completed, and the data of frequency shifts can be saved for later treatment. This instrument provides a strong tool for mixture determination, complex substances classification with piezoelectric crystal sensor array or kinetic frequency signal observation for piezoelectric crystal sensor. It is of great use for analytical chemistry.
Effect of High Temperature Treatment on Electric Properties of PZT/PVDF Piezoelectric Composites

XU Ren-xin,CHEN Wen,PENG Shao-xian,LI Yue-ming,SUN Hua-jun

DOI: https://doi.org/10.3969/j.issn.1003-4684.2005.02.006

2005-01-01

Abstract:Lead zirconate titanate(PZT)/polyvinylidene fluoride(PVDF) piezoelectric composites were prepared using the ceramic powders treated at high temperature and the untreated ones. The effect of high-temperature treatment on the microstructures, polarization, piezoelectric and dielectric properties in the composite was studied. The results show that the composite with treated PZT has less porosity. And the remnant polarization in the treated sample obviously increases. High temperature treatment increases the piezoelectric constant and the dielectric constant in the composites.
[Raman scattering studies on 0.5PZN-0.5PZT piezoceramics]

Li-min Chang,Yu-dong Hou,Man-kang Zhu,Hui Yan

Abstract:PZT based multi-system has shown super piezoelectric properties when the composition was located at morphotropic phase boundary (MPB), which divided the regions into rhombohedral and tetragonal structures equally. In the present paper, the diffuse phase transition and phase coexistence of rhombohedral and tetragonal phases of 0.5PZN-0.5PZT ceramics were investigated by Raman scattering spectroscopy in detail. The results revealed that compared with pure PZT, the width of Raman bands of 0.5PZN-0.5PZT was quite broad, indicating that the system has strong relaxor feature. According to the temperature dependence of dielectric permittivity, the indicator of degree of diffuseness, gamma, was calculated and the values were as high as 1.71. Through the separation by Gauss fitting of the Raman bands, the intensities of different Raman vibration modes, such as the tetragonal E (3TO), A1 (3TO), E (4LO) and A1 (3LO) modes, as well as the rhombohedral R1 and Rh modes, were determined. The results indicated that for 0.5PZN-0.5PZT system, the fraction of rhombohedral phase was equal to the tetragonal phase, which has also been affirmed by XRD results and suggested that the system was close to the MPB. Excellentpiezoelectric properties, such as kp (0.66) and d33 (425 pC/N), were found in 0.5PZN-0.5PZT system, showing a great promise of this system as practical materials for piezoelectric actuators.
Effect of Impurities Pinning on the Domains of PSTZT Ceramics

Wei Shi,Qiang Chen,Lin Chen,Wei Huang,Yi Zhao,Dingquan Xiao,Jianguo Zhu

DOI: https://doi.org/10.1109/isaf.2007.4393265

2007-01-01

Abstract:(1-x)Pb(Sc0.5Ta0.5)O3-xPb(Zr0.52Ti0.48)O-3 (PSTZT-100x) ceramics were prepared by using conventional oxide processing, and their piezoelectric and ferroelectric properties studied. The results of X-ray diffraction (XRD) suggest that PSTZT-100x ceramics formed a single-phase perovskite structure when 0.1=x=0.8. The ceramics exhibit relatively good piezoelectric and ferroelectric properties: piezoelectric constant, d(33)=117 pC/N; planar electromechanical coupling factor, k(p) = 45%, remnant polarization, P-r=14 mu C/cm(2), coercive field, E-c=0.65 kV/mm. When x>0.70, the polarization-field hysteresis curves of PSTZT ceramics show "pinched" shapes instead of the normal square-like P-E loops when tested at room temperature and different frequency. In the meantime, the coercive field, polarization and internal bias field of PSTZT ceramics are strongly dependent on frequency or temperature. A defect pinning may induces the unsaturated hysteresis loop of PSTZT ceramics.
Piezo-actuated smart mechatronic systems for extreme scenarios

Zhongxiang Yuan,Shuliu Zhou,Cailin Hong,Ziyu Xiao,Zhengguang Zhang,Xuedong Chen,Lizhan Zeng,Jiulin Wu,Yunlong Wang,Xiaoqing Li

DOI: https://doi.org/10.1088/2631-7990/ad9366

2024-11-29

International Journal of Extreme Manufacturing

Abstract:Precision actuation is a foundational technology in high-end equipment domains, where stroke, velocity, and accuracy are critical for processing and/or detection quality, precision in spacecraft flight trajectories, and accuracy in weapon system strikes. Piezoelectric actuators (PEAs), known for their nanometer-level precision, flexible stroke, resistance to electromagnetic interference, and scalable structure, have been widely adopted across various fields. Therefore, this study focuses on extreme scenarios involving ultra-high precision (micrometer and beyond), minuscule scales, and highly complex operational conditions. It provides a comprehensive overview of the types, working principles, advantages, and disadvantages of PEAs, along with their potential applications in piezo-actuated smart mechatronic systems (PSMSs). To address the demands of extreme scenarios in high-end equipment fields, we have identified five representative application areas: positioning and alignment, biomedical device configuration, advanced manufacturing and processing, vibration mitigation, micro robot system. Each area is further divided into specific subcategories, where we explore the underlying relationships, mechanisms, representative schemes, and characteristics. Finally, we discuss the challenges and future development trends related to PEAs and PSMSs. This work aims to showcase the latest advancements in the application of PEAs and provide valuable guidance for researchers in this field.

engineering, manufacturing,materials science, multidisciplinary
Origin of Reliable High-Power Performances of PbZr0.5Ti0.5O3-Pb(Mn1/3Nb2/3)O3-Based Piezoelectric Ceramics.

Wenbin Tang,Xuefeng Zhao,Zhiyong Pan,Zhiqin Zeng,Hongdi Wu,Yiping Wang,Ying Yang,Yuequn Wang,Guanglei Xiang,Yaojin Wang,Shan-Tao Zhang,Guoliang Yuan

DOI: https://doi.org/10.1021/acsami.4c12838

IF: 9.5

2024-01-01

ACS Applied Materials & Interfaces

Abstract:High-power piezoelectric ceramics typically operate under severe conditions. This makes the accurate evaluation of their high-power performances through pure quasi-static parameters challenging. The 0.94PbZr(0.5)Ti(0.5)O(3) - 0.06Pb(Mn1/3Nb2/3)O-3 + 0.005Fe(2)O(3) + 0.002Sc(2)O(3) (PZT-1) ceramic exhibits exceptional and reliable high-power performances at elevated temperatures and under loading conditions. While numerous PZT-based ceramics demonstrate excellent quasi-static parameters, only the PZT-1 ceramic displays superior high-field parameters, such as a low tan delta of 0.97% at 566 V/mm (1 kHz) and a large Q(m) of 1164 at 50 V/mm (100 kHz). Therefore, the PZT-1 ceramic demonstrates remarkably slow heat generation and the highest surface temperatures are only 41.8 degrees C at 50 V/mm (100 kHz). Moreover, the PZT-1 ceramic shows a minimal resonance frequency variation of -0.04% in the temperature range of 25-120 degrees C at 50 V/mm. Consequently, the PZT-1 ceramic maintains a high and reliable vibration velocity of 0.90 m/s at 120 degrees C for 30 min, and the ceramic cantilever sustains a high amplitude of 7 mu m, significantly outperforming other ceramics. This study conclusively demonstrates that high-field parameters, rather than quasi-static parameters, are more effective in accurately estimating the high-power performances of ceramics.

The Characteristics of PZTA and Its Controlling System

Electric characteristics of PZTA and its driving system

Large-angle and ultra-cold scanner

Measurement Accuracy Improvement With Pzt Scanning For Detection Of Dpc In Hi-Bi Fibers

Cutting Temperature and Force Data Acquisition and Measuring System Design in High Speed Machining

Experimental research on scanning performance of four-segmented PZT tube

Study on technology of zinc oxide piezoelectric thin film device with surface micromachining substrate

Design of two-dimensional piezoelectric laser scanner system for precision laser beam steering

Design And Optimization Of Micro Scanner Driven By Folded Piezoelectric Unimorph Actuators Using Pzt Films

PYROELECTRIC AND THERMAL STRAIN EFFECTS OF PIEZOELECTRIC (PVDF AND PZT) DEVICES

Excellent Uniformity and Properties of Micro-Meter Thick Lead Zirconate Titanate Coatings with Rapid Thermal Annealing

Study on the computer control system for the piezoelectric traveling-wave motor

Analysis of Dynamic Characteristics of Focusing System Based on PZT Micro-Actuator

Compound Three-dimensional Piezoelectric Scanner Used in Scanning Probe Microscopy

Two-Dimensional Optical Scanning of A Piezoelectric Cantilever Actuator

Computer controlled measurement and data acquisition system for piezoelectric crystal sensor array

Effect of High Temperature Treatment on Electric Properties of PZT/PVDF Piezoelectric Composites

[Raman scattering studies on 0.5PZN-0.5PZT piezoceramics]

Effect of Impurities Pinning on the Domains of PSTZT Ceramics

Piezo-actuated smart mechatronic systems for extreme scenarios

Origin of Reliable High-Power Performances of PbZr0.5Ti0.5O3-Pb(Mn1/3Nb2/3)O3-Based Piezoelectric Ceramics.