Analysis of Dynamic Characteristics of Focusing System Based on PZT Micro-Actuator

YAN Wei,LIANG Yi-yong,YANG Guo-guang
DOI: https://doi.org/10.3969/j.issn.1005-5630.2006.02.012
2006-01-01
Abstract:To improve the focusing systematic stability and response speed of the laser direct writing system,a reasonable modeling for strength and displacement relation of the micro-actuator,which is the executive body in the focusing system,was proposed based on elastic mechanics.Full analysis of the dynamic response characteristics have been done,which provides a theoretic evidence for PID adjustment.It focuses on differentiation in PID adjustment,amends the phase lag problem and gets better systematic stability and response speed.Experience on the laser direct writing system,we got that the precision of the focusing system is 0.2μm.
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