Abstract:Benefiting from the decent converse piezoelectric effect, the piezoelectric nanopositioning stage has been applied to various micro-to-nano motion scenarios with splendid control performance and advantages. However, the inherent nonlinearity characteristics of piezoelectric significantly degrade the tracking accuracy and result in obvious positioning uncertainties. Especially the hysteresis effect mainly brings about the apparent control period lag and the reciprocating stroke inconsistency. Substantial existing control methods focus on establishing approximate hysteresis or inverse hysteresis model to suppress these adverse nonlinearities. Nevertheless, these methods commonly require sophisticated nonlinear modeling procedures, and the control performance largely relies on the modeling accuracy. Notably, the linear characteristics of the piezoelectric actually still perform a major influence on the control process, which can be significantly suppressed by straightforward linear algorithms. After compensating for the linearities, the nonlinearities only demonstrate an obviously marginal impact on the control performance. On this basis, the linear and nonlinear methods integration idea is proposed to replace the conventional modeling algorithm in this paper. Several combinations are discussed and conducted on the stage to validate the effectiveness of this idea.

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