Precision Positioning System Based on Intelligent Fuzzy-PID Control

Zhen Liu,Liqiong Zhang,Yan Li

DOI: https://doi.org/10.1117/12.886016

2010-01-01

Abstract:To break through the limitations of static and dynamic characteristics of conventional step motor driven open-loop positioning devices, a two-dimensional precision positioning system with a travel range of 100mmx100mm has been developed. This paper presents its structure, control principle and performance experiments. This system, equipped with cross roller guides working as linear guiding elements, is driven by step motors through ball screw transmission. A three-axis dual-frequency laser interferometric measurement system is established for real-time measurement and feedback of system's movements in three degrees of freedom (DOF) and an intelligent Fuzzy-PID controller is implemented for this system's motion control. In the controller, the PID module calculates the output from motor drivers and its initial parameters are tuned through expansion of critical proportioning method; the Fuzzy module optimizes PID parameters to fulfill specific requirements of different movement stages. A dead zone control mechanism is developed in this controller to minimize the oscillations around target position. Experimental results indicate that system with Fuzzy-PID controller shows faster response than that with ordinary PID controller. Moreover, with this controller implemented, the developed precision positioning system achieves better repeatability (+/- 2 mu m) and accuracy (+/- 2.5 mu m) within the full range than open-loop system using step motor.