Precision Stage Motion Controller Based on a Vibration Model

YE Peiqing,YANG Kaiming,YIN Wensheng

DOI: https://doi.org/10.3321/j.issn:1000-0054.2006.02.013

2006-01-01

Abstract:High acceleration movements of a precision stage result in reaction forces that lead to mechanical resonance in the stage,which reduces the tracking accuracy and lengthens the positioning time.A simple controller architecture was developed to reduce the mechanical resonance based on a vibration model of the stage with the pole assignment and the model parameter matching methods used to design a PID controller.Tests showed that the tracking accuracy of the controller was 2 μm better than a normal PID controller with acceleration feedforward control at a uniform speed of 200 mm/s and at an acceleration of 1 g,while the positioning time was reduced by 10 ms.The results show that the vibration model-based PID motion controller has much better dynamic response and tracking performance.