Design Of Disturbance Observer For Precision Stage

Yang Kaiming,Zhu Yu,Ye Peiqing
2005-01-01
Abstract:The precision stage droved by linear-motor and sustained by air-bearing shows the characteristic of zero mechanical damping and weak anti-disturbance. In order to neutralize disturbance introduced by cable on the stage and by the thrust fluctuation of the linear-motor within the short duration of the servo cycle(110us), to enhance the tracking accuracy of the stage, a disturbance observer based on the precision nominal model is proposed, result in the motion control architecture based on PD Plus disturbance observer. In the check experiments, compared to the PD control without disturbance observer, the static positioning accuracy of the stage is improved 0.5 mu m, while the tracking accuracy is improved 3 mu m at the uniform speed of 120mm/s. The results show that the proposed algorithm can control the external disturbance effectively and is rather simple; it can be used to enhance the comprehensive performance of the stage.
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