Design of Disturbance Observer for Ultra-precision Stages

JIA Song-tao,ZHU Yu,YANG Kai-ming,LI Heng
2007-01-01
Abstract:The precision stage driven by a linear motor and sustained by air-bearing tracks has the characteristics of zero mechanical damping and poor anti-disturbance.A controller with feedforward,feedback and disturbance observer for the precision stage driven by a linear motor was designed by the method of disturbance observation to restrain the disturbance caused by cables on the stage and thrust fluctuation of the linear motor so that the position precision of the stage was enhanced and the trajectory following error was reduced,and the design project of the disturbance observer was discussed in detail.The experimental results indicate that the static position precision is in a range of ±0.15 μm and the following error can be controlled in a range of ±1.5 μm at the speed of 150 mm/s after the disturbance observer is employed.In summary,the disturbance observer can effectively restrain the influences of low-frequency noise and parameter fluctuation.
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