Design of Disturbance Observer Based on Linear Motor Precision Stage

Yang Kaiming,Ye Peiqing,You Huayun,Chu Yicheng
DOI: https://doi.org/10.3321/j.issn:1003-8728.2005.12.012
2005-01-01
Abstract:The precision stage driven by a linear-motor and sustained by air-bearing tracks has the characteristics of zero mechanical damping and weak anti-disturbance.In order to block disturbance introduced by cable on the stage and by the thrust fluctuation of the linear-motor within the short period of the servo cycle(110 μs) and to enhance the tracking accuracy of the stage,we propose a disturbance observer based on the nominal model of the precision stage,forming the motion control architecture based on a PD plus disturbance observer.During check experiments,compared with the PD control without any disturbance observers,the static positioning accuracy of the stage increases 0.3 μm,while the tracking accuracy increases 2 μm at the uniform speed of 120 mm/s.The results show that the proposed algorithm can control the external disturbance effectively and is rather simple.It can be used to enhance the comprehensive performance of the stage.
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