Large-angle and ultra-cold scanner

Xiaowu Shu,Cheng Liu,Weidang Zhao,Guoguang Yang

1998-01-01

Abstract:The theoretical characteristics and the manufacture technique of a novel piezoelectric optical angle scanner (PZTA) are presented in this paper. On the base of PZT's "anti-piezoelectric effect", a new optical scanner that can be used in ultra-cold environment has been developed.

What problem does this paper attempt to address?

The Characteristics of PZTA and Its Controlling System

Xiaowu Shu

1998-01-01

Abstract:In this paper,The mechanical characteristics of piezoelectric optical angle scanner(PZTA) and its influence on the scanning quality is detailed. With the computer controlling, we can get high scanning quality by adjusting the input signal style. PZTA can scan more than 3°under ultra-cold environment (100K). The scanning frequency is up to 20Hi and linear is 1 %.
Electric characteristics of PZTA and its driving system

Xiaowu Shu

1998-01-01

Abstract:The electric characteristics of piezoelectric optical angle scanner (PZTA) and its influence on the scanning quality were analyzed in detail. A driving electric circuit of PZTA was designed to realize large angle of scanning. With this circuit, PZTA can scan more than 3° under low temperature environment (100 K). The scanning frequency is 20 Hz.
A New Optical Angle Measurement and Compensation

SONG Ji-dong,ZHANG Wan-zhen,LIN Bin

DOI: https://doi.org/10.3788/gzxb20114003.0354

2011-01-01

Abstract:In the process of cutting quartz,machining errors often cause two surfaces unparallel,which will can influence on the judgment to its crystal orientation.The angle measurement of full-automated x-ray sorting machine was analyzed.The light spots deflected by quartz were detected by position sensitive detector,and relational expression between points position sensitive detector detected in the coordination and angles between top and bottom surfaces was deduced.And,the shapes of the light spots on the position sensitive detector in different incident angles and thicknesses were studied.It was found that similar linear relationship exists between height differences at coordination axis on position sensitive detector.When the incident angle is 20°,the norm of residual has the smallest value of 5.306 2×10-6 mm.The system resolution and measurement range are 1.033″ and 15′ respectively.
Wide-Range Scanner With Hinge Mechanism And Its Application In Atomic Force Microscope

Xh Li,Hj Zhang,Dx Zhang

2004-01-01

Abstract:With the wide application of piezo element (PZT) in micro displacement system, one limitation that the scan range or the displacement generated by PZT is comparatively small cannot be neglected. In this article, a new method of magnifying micro displacement of PZT is presented. By using a hinge mechanism, scan range of atomic force microscope (AFM) scanner can be enlarged by several times without changing the basic structure of the scanner or increasing the scanning voltage. Because the sample surface is approximately at the same height, the scan range can keep the original linearity. Using the wide-range scanner with hinge mechanism, we develop a wide-range AFM system. Experiments on the system show that using the hinge mechanism can significantly enlarge the scan range. As the effective length of magnification arm being changed, the magnification ratio can be adjusted so that different scan range can be obtained. The maximum scan range of 11.54mum x 11.54mum is reached. In conclusion, the wide-range scanner with hinge mechanism features with a simple and compact structure, a high resolution, a good stability and an adjustable scan range.
A Stitching Method for AFM Based Large Scale Scanning with High Resolution

sheng zhao,qinmin yang

DOI: https://doi.org/10.3182/20140824-6-za-1003.02774

2014-01-01

IFAC Proceedings Volumes

Abstract:Internal nonlinearities within piezoelectric actuators of Atomic Force Microscopes (AFM) still pose a great challenge for practicers in the area of nanotechnology. Especially, when topography of a large scale area is required along with high resolution, traditional scanning protocol will deteriorate the distortion of images. In this paper, a novel block scan and stitching method is proposed to mitigate such phenomena. By dividing the whole area into blocks and integrating them subsequently, creep, hysteresis and thermal drift within images can be reduced largely. Moreover, the whole procedure is executed in an automatic manner without human's intervention. Its feasibility is also verified by real experimental results.
A Two-Dimensional Micro Scanner Integrated With A Piezoelectric Actuator And Piezoresistors

Chi Zhang,Gaofei Zhang,Zheng You

DOI: https://doi.org/10.3390/s90100631

IF: 3.9

2009-01-01

Sensors

Abstract:A compact two-dimensional micro scanner with small volume, large deflection angles and high frequency is presented and the two-dimensional laser scanning is achieved by specular reflection. To achieve large deflection angles, the micro scanner excited by a piezoelectric actuator operates in the resonance mode. The scanning frequencies and the maximum scanning angles of the two degrees of freedom are analyzed by modeling and simulation of the structure. For the deflection angle measurement, piezoresistors are integrated in the micro scanner. The appropriate directions and crystal orientations of the piezoresistors are designed to obtain the large piezoresistive coefficients for the high sensitivities. Wheatstone bridges are used to measure the deflection angles of each direction independently and precisely. The scanner is fabricated and packaged with the piezoelectric actuator and the piezoresistors detection circuits in a size of 28 mm x 20 mm x 18 mm. The experiment shows that the two scanning frequencies are 216.8 Hz and 464.8 Hz, respectively. By an actuation displacement of 10 mu m, the scanning range of the two-dimensional micro scanner is above 26 degrees x 23 degrees. The deflection angle measurement sensitivities for two directions are 59 mV/deg and 30 mV/deg, respectively.
A novel scanning tunneling microscopy for long range and high aspect ratio measurement

Yuanliu Chen,Bingfeng Ju

2010-01-01

Abstract:To improve the metrological characteristics of the measurement technique scanning probe microscopy by broadening its measuring range as well as increasing its high aspect ratio measuring capability, a new STM has been developed. A dual-stage servo instead of 3D PZT tube scanner is arranged such that for features within the range of the fast actuator, both long range and high speed. The raster scanning is achieved by two linear stages that driven by servo-motors. Each of the stage has a travel stroke of 25 mm, a maximum speed of 1.5 mm/s and a minimum incremental motion of 10 nm. A PZT actuator mounted onto the raster scanning stage serves as fast feedback servo for operation on constant current mode. Also in order to enable the STM to measure high aspect ratio micro structures, STM probe with high aspect ratio up to 450:1 has been developed and integrated into the new STM. Using this new STM system, a long range of 500 μm line scanning and a 300 μm× 300 μm 3D surface scanning has been successfully achieved. A trench with a depth of 2.8 μm has also been faithfully measured.
Study of piezo-induced surface vibration in solids using atomic force probe

Fanghao Li,Dongxian Zhang,Haijun Zhang

DOI: https://doi.org/10.4028/www.scientific.net/KEM.562-565.1214

2013-01-01

Key Engineering Materials

Abstract:Piezo-induced surface vibrations in solids with nanometer amplitude are detected and analyzed. The vibrations are excited by the piezo element using a PZT component, which attached to the target material and controlled by a signal generator. The detections of such vibrations are carried out using the atomic force probe (APP). The APP is a very sensitive instrument utilizing a nano-tip connected to a cantilever to detect vibrations through an interaction of atomic force between the tip and the target surface with sub-nanometer resolution, about 30 times more precise than the piezoelectric sensor for the same signal detection. The glass material has been chosen as the target solid. The enhancement effect of the vibrations in the glass slice around resonance frequency is confirmed, the maximum amplitude appears at 7.4 kHz. The piezo-induced vibration will be employed in our future research for developing piezo-induced and laser-induced surface acoustic wave (SAW) motor.
Two-Dimensional Optical Scanning of A Piezoelectric Cantilever Actuator

Xiangcheng Chu,Long Ma,Songmei Yuan,Mengkai Li,Longtu Li

DOI: https://doi.org/10.1007/s10832-007-9292-2

2007-01-01

Journal of Electroceramics

Abstract:A piezoelectric optical scanning cantilever structure with two-dimensional scanning angles was reported. The theoretical and experimental studies on the structure were carried out. By using finite element method, the effect of the materials and the structure size on the theoretical results were concluded, and a favorable two-dimensional piezoelectric optical scanning structure with a single cantilever was obtained. A two-dimensional piezoelectric optical scanning specimen was fabricated. It was found that a 0.282° bending scanning angle at 1056 Hz and a 0.12° torsional scanning angle at 4612 Hz were obtained under the forcing voltage of 5 V (o–p).
A low-temperature scanning probe microscopy system with molecular beam epitaxy and optical access

Ze-Bin Wu,Zhao-Yan Gao,Xi-Ya Chen,Yu-Qing Xing,Huan Yang,Geng Li,Ruisong Ma,Aiwei Wang,Jiahao Yan,Chengmin Shen,Shixuan Du,Qing Huan,Hong-Jun Gao

DOI: https://doi.org/10.1063/1.5046466

2021-03-07

Abstract:A low-temperature ultra-high vacuum scanning probe microscopy (SPM) system with molecular beam epitaxy capability and optical access was conceived, built, and tested in our lab. The design of the whole system is discussed here, with special emphasis on some critical parts. We made an SPM scanner head with a modified Pan-type design, enclosed by a double-layer cold room under a bath type cryostat. The scanner head is very rigid, compatible with optical access paths, and can accommodate both scanning tunneling microscope (STM) tips and atomic force sensors. Two piezo-actuated focus-lens stages are mounted on the two sides of the cold room to couple light in and out. To demonstrate the system performance, we performed STM and scanning tunneling spectroscopy studies. The herringbone reconstruction and atomic structure of Au(111) surface were clearly resolved. The dI/dV spectra of an Au(111) surface were obtained at 5 K. In addition, a periodic 2D tellurium (Te) structure was grown on Au(111) surface using MBE.

Instrumentation and Detectors,Mesoscale and Nanoscale Physics,Materials Science
Piezo tube stacked scanning tunneling microscope for use in extreme and confined environments

Jihao Wang,Mengbo Sun

DOI: https://doi.org/10.1016/j.micron.2024.103719

IF: 2.381

Micron

Abstract:Scanning Tunneling Microscopy (STM) is widely used for observing atomic structures due to its ultra-high spatial resolution. As the core units of STM, the coarse stepper motor and imaging unit, have conflicting size requirements for piezo tubes. Longer piezo tubes yield greater output force and easier movement for the motor, while shorter tubes enhance imaging precision and stability for the scanner. Traditional STMs typically employ a large piezo tube for coarse stepping and a smaller one for independent imaging to address this issue. Here, we present the new design of a piezo tube stacked STM, in which two independent piezo tubes act together during tip-sample approach process and only one shorter tube works during scanning imaging. Both tubes are fixed to the framework, ensuring high rigidity and compactness. The new design enables us to achieve both coarse stepping and imaging functions with a total length of only 25 mm for the two tubes, effectively reducing the length of whole STM, facilitating its integration into narrow low-temperature spaces for imaging applications. Using this device, we obtained high-quality atomic images of graphite sample surfaces at room temperature. Continuous scanning imaging of the same area on Au film at 300 K demonstrates the STM's high stability in both X-Y and Z directions. Atomic images, I-V spectra, and di/dv spectra obtained at 2 K on graphite surface illustrate the excellent application potential of this device in low-temperature environments. Finally, atomic images obtained of graphite in sweeping the magnetic fields from 0 T to 11 T in a huge vibrational dry magnet prove the new STM's excellent performance in extreme conditions.
Design And Optimization Of Micro Scanner Driven By Folded Piezoelectric Unimorph Actuators Using Pzt Films

Huajun Fang,Litian Liu,Xiaoming Wu,Ningxin Zhang,Tianling Ren

DOI: https://doi.org/10.1080/10584580500413384

2005-01-01

Integrated Ferroelectrics

Abstract:A microscanner actuated by folded piezoelectric unimorph actuators using PZT thin films is designed and optimized to obtain large scanning angle with low driving voltage and stable mechanical performance. The micro scanner consists of two piezoelectric folded cantilever microactuators and a planar micromirror between the microactuators. Each actuator consists of several multilayer cantilevers in series. The device structure and fabrication process are presented and the mechanical performance of the microscanner is simulated and optimized. The deflecting angle of the piezoelectrically actuated microscanner with respect to applied voltage and structural parameters are investigated. With large tilting angle, small chip size and low power dissipation, the piezoelectrically actuated microscanner is expected to be promising for wide scanning applications.
A qPlus-based scanning probe microscope compatible with optical measurements

Bowei Cheng,Da Wu,Ke Bian,Ye Tian,Chaoyu Guo,Kaihui Liu,Ying Jiang

DOI: https://doi.org/10.1063/5.0082369

IF: 1.6

2022-01-01

Review of Scientific Instruments

Abstract:We design and develop a scanning probe microscope (SPM) system based on the qPlus sensor for atomic-scale optical experiments. The microscope operates under ultrahigh vacuum and low temperature (6.2 K). In order to obtain high efficiency of light excitation and collection, two front lenses with high numerical apertures (N.A. = 0.38) driven by compact nano-positioners are directly integrated on the scanner head without degrading its mechanical and thermal stability. The electric noise floor of the background current is 5 fA/Hz(1/2), and the maximum vibrational noise of the tip height is below 200 fm/Hz(1/2). The drift of the tip-sample spacing is smaller than 0.1 pm/min. Such a rigid scanner head yields small background noise (oscillation amplitude of & SIM;2 pm without excitation) and high quality factor (Q factor up to 140 000) for the qPlus sensor. Atomic-resolution imaging and inelastic electron tunneling spectroscopy are obtained under the scanning tunneling microscope mode on the Au(111) surface. The hydrogen-bonding structure of two-dimensional (2D) ice on the Au(111) surface is clearly resolved under the atomic force microscope (AFM) mode with a CO-terminated tip. Finally, the electroluminescence spectrum from a plasmonic AFM tip is demonstrated, which paves the way for future photon-assisted SPM experiments. Published under an exclusive license by AIP Publishing.
Compound Three-dimensional Piezoelectric Scanner Used in Scanning Probe Microscopy

Tao HONG,Jia WANG,Xiu-mei LIU,Lin DING

DOI: https://doi.org/10.3969/j.issn.1004-2474.2000.01.010

2000-01-01

Abstract:The piezoelectric scanner is one of the key components of scanning probe microscope. A compound three-dimensional piezoelectric scanner has been designed and constructed. The performances of piezoelectric scanner have been investigated. Impelled by the voltage of 400 V,the scanner achieves a scanning range of 13μm×13 pm. The nonlinearity of x.y direction and z direction is less than 0. 36% and 0. 14% respectively. This kind of scanner has been used in the system of scanning near field optical microscope.
A Resonant Piezoelectric MEMS Mirror with 180-Degree Optical Scan Angle Under Atmosphere Pressure

Hung-Yu Lin,Hao-Chien Cheng,Shih-Chi Liu,Chih-Chen Hsu,Si-Han Chen,Jerwei Hsieh,Ruey-Shing Huang,Mei-Feng Lai,Weileun Fang

2023-01-01

Abstract:This study designs and realizes the world’s first resonant piezoelectric MEMS scanning mirror of a 180degree optical scan angle (±45-degree mechanical scan angle) without vacuum in published works. Which is close to the maximum of the human viewing angle. In Fig. 1, this design has three merits: (1) U-shape actuator (Fig. 1a): to generate a non-uniform distributed inertia force on the mirror plate (1.5mm in diameter) and further cause it rotate about the serpentine spring, (2) serpentine springs slightly off-set (distance "e") from the gravity center of mirror (Fig. 1a): to provide a moment arm to rotate the mirror, (3) serpentine spring (Fig. 1b): special shape design to lower the stress during large-angle scanning through the combination of bending and torsion on spring. Measurements demonstrate the scanner has an optical scan angle of 180-degree at the resonant frequency of 1.5kHz (no vacuum required) with driving voltage of 13V.
The development of a low-temperature terahertz scanning tunneling microscope based on a cryogen-free scheme

Huaiyu Zhang,Dacheng Tian,Yang Zhan,Zijia Liu,Chen Ma,Yuwu Zhang,Jianwei Hu,Xiaoyue He,Baojie Feng,Yiqi Zhang,Lan Chen,Peng Cheng,Kehui Wu

DOI: https://doi.org/10.1063/5.0208689

2024-09-01

Abstract:We have developed a cryogen-free, low-temperature terahertz scanning tunneling microscope (THz-STM). This system utilizes a continuous-flow cryogen-free cooler to achieve low temperatures of ∼25 K. Meanwhile, an ultra-small ultra-high vacuum chamber results in the reduction of the distance from sample to viewport to only 4 cm. NA = 0.6 can be achieved while placing the entire optical component, including a large parabolic mirror, outside the vacuum chamber. Thus, the convenience of optical coupling is much improved without compromising the performance of STM. Based on this, we introduced THz pulses into the tunnel junction and constructed the THz-STM, achieving atomic-level spatial resolution in THz-driven current imaging and sub-picosecond (sub-ps) time resolution in autocorrelation signals during pump-probe measurements. Experimental data from various representative samples are presented to showcase the performance of the instrument, establishing it as an ideal platform for studying non-equilibrium dynamic processes at nanoscale.
Ultra-High Frequency Surface Acoustic Wave Sensors for Temperature Detection

Qi Dong,Qutong Yang,Xiaoyang Liu,Shenghe Hu,Wenzhe Nie,Zhao Jiang,Xiaoming Fan,Jingting Luo,Ran Tao,Chen Fu

DOI: https://doi.org/10.3390/mi15010135

IF: 3.4

2024-01-16

Micromachines

Abstract:Highly sensitive surface acoustic wave (SAW) sensors have recently been recognized as a promising tool for various industrial and medical applications. However, existing SAW sensors generally suffer from a complex design, large size, and poor robustness. In this paper, we develop a simple and stable delay line ultra-high frequency (UHF) SAW sensor for highly sensitive detection of temperature. A Z-shaped delay line is specially designed on the piezoelectric substrate to improve the sensitivity and reduce the substrate size. Herein, the optimum design parameters of extremely short-pitch interdigital transducers (IDTs) are given by numerical simulations. The extremely short pitch gives the SAW sensor ultra-high operating frequency and consequently ultra-high sensitivity. Several experiments are conducted to demonstrate that the sensitivity of the Z-shaped SAW delay line sensor can reach up to 116.685°/°C for temperature detection. The results show that the sensor is an attractive alternative to current SAW sensing platforms in many applications.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Wide Two-Degree-of-Freedom Static Laser Scanner with Miniaturized Transmission Mechanism and Piezoelectric Actuation

Takashi Ozaki,Norikazu Ohta,Motohiro Fujiyoshi

DOI: https://doi.org/10.3390/s21186077

IF: 3.9

2021-09-10

Sensors

Abstract:In recent years, laser scanners have attracted significant attention for applications such as laser radars. However, the establishment of a two-degree-of-freedom scanner that can quasi-statically drive a large mirror with a large deflection angle has proven to be challenging. In this paper, we propose a laser scanner design and fabrication method by combining two unimorph piezoelectric actuators composed of piezoelectric single-crystal Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 and a miniature translation-rotation conversion mechanism with flexible polyimide hinges. The size of the entire scanner was 32 mm × 12 mm × 10 mm. We successfully demonstrated that the scanner could achieve a large quasi-static mechanical deflection angle amplitude of 20.5° in two axes with a 6-mm-square mirror.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Piezo-driven Sample Rotation System with Ultra-Low Electron Temperature

Pengjie Wang,Ke Huang,Jian Sun,Jingjin Hu,Hailong Fu,Xi Lin

DOI: https://doi.org/10.1063/1.5083994

IF: 1.6

2019-01-01

Review of Scientific Instruments

Abstract:Piezo-driven rotator is convenient for tilted magnetic field experiments due to its precise angle control. However, the rotator itself and the sample mounted on it are difficult to be cooled down because of extra heat leaks and presumably bad thermal contacts from the piezo. Here, we report a piezo-driven sample rotation system designed for ultra-low temperature environment. The sample, as well as the rotating sample holder, can be cooled to as low as 25 mK by customized thermal links and thermal contacts. More importantly, the electron temperature in the electrical transport measurements can also be cooled down to 25 mK with the help of home-made filters. To demonstrate the application of our rotation system at ultra-low electron temperature, a measurement revealing tilt-induced localization and delocalization in the second Landau level of two-dimensional electron gas is provided.
Design of two-dimensional piezoelectric laser scanner system for precision laser beam steering

Dong Luo,Xiaogang Xiong,Wei Chen,Ruining Huang

DOI: https://doi.org/10.1063/5.0138139

2023-10-01

Abstract:In this work, a large aperture two-dimensional (2D) piezoelectric laser scanner system with an onboard sensor to detect the scanner's deflection angle has been designed and prototyped. The proposed 2D laser scanner is driven using three amplified piezoelectric actuators assembled in an equilateral triangle configuration to provide structural stability and compactness. To overcome the nonlinearity that derives from the hysteresis effect of the piezoelectric actuators, the tip-tilt principle and the control schemes of the 2D scanner are analyzed and compared. Thanks to the combination of onboard sensing of the deflection angle of the scanner with the closed-loop control capability, this 2D scanner's features include a large aperture and high accuracy. The experimental results demonstrate that closed-loop control achieves higher control accuracy than the open-loop control approach, leading to a reduction in the relative error from 2%-4% to ∼0.5%, while the deflection angle tracking accuracy lies approximately within the 40 μrad range.

Large-angle and ultra-cold scanner

The Characteristics of PZTA and Its Controlling System

Electric characteristics of PZTA and its driving system

A New Optical Angle Measurement and Compensation

Wide-Range Scanner With Hinge Mechanism And Its Application In Atomic Force Microscope

A Stitching Method for AFM Based Large Scale Scanning with High Resolution

A Two-Dimensional Micro Scanner Integrated With A Piezoelectric Actuator And Piezoresistors

A novel scanning tunneling microscopy for long range and high aspect ratio measurement

Study of piezo-induced surface vibration in solids using atomic force probe

Two-Dimensional Optical Scanning of A Piezoelectric Cantilever Actuator

A low-temperature scanning probe microscopy system with molecular beam epitaxy and optical access

Piezo tube stacked scanning tunneling microscope for use in extreme and confined environments

Design And Optimization Of Micro Scanner Driven By Folded Piezoelectric Unimorph Actuators Using Pzt Films

A qPlus-based scanning probe microscope compatible with optical measurements

Compound Three-dimensional Piezoelectric Scanner Used in Scanning Probe Microscopy

A Resonant Piezoelectric MEMS Mirror with 180-Degree Optical Scan Angle Under Atmosphere Pressure

The development of a low-temperature terahertz scanning tunneling microscope based on a cryogen-free scheme

Ultra-High Frequency Surface Acoustic Wave Sensors for Temperature Detection

Wide Two-Degree-of-Freedom Static Laser Scanner with Miniaturized Transmission Mechanism and Piezoelectric Actuation

Piezo-driven Sample Rotation System with Ultra-Low Electron Temperature

Design of two-dimensional piezoelectric laser scanner system for precision laser beam steering