Wide-Range Scanner With Hinge Mechanism And Its Application In Atomic Force Microscope

Xh Li,Hj Zhang,Dx Zhang
2004-01-01
Abstract:With the wide application of piezo element (PZT) in micro displacement system, one limitation that the scan range or the displacement generated by PZT is comparatively small cannot be neglected. In this article, a new method of magnifying micro displacement of PZT is presented. By using a hinge mechanism, scan range of atomic force microscope (AFM) scanner can be enlarged by several times without changing the basic structure of the scanner or increasing the scanning voltage. Because the sample surface is approximately at the same height, the scan range can keep the original linearity. Using the wide-range scanner with hinge mechanism, we develop a wide-range AFM system. Experiments on the system show that using the hinge mechanism can significantly enlarge the scan range. As the effective length of magnification arm being changed, the magnification ratio can be adjusted so that different scan range can be obtained. The maximum scan range of 11.54mum x 11.54mum is reached. In conclusion, the wide-range scanner with hinge mechanism features with a simple and compact structure, a high resolution, a good stability and an adjustable scan range.
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