A New Type of Atomic Force Microscope System Based on Plate Scanner

YU Hai-feng,LIU Chao,ZHANG Dong-xian

DOI: https://doi.org/10.3969/j.issn.1005-5630.2007.04.013

2007-01-01

Abstract:A novel atomic force microscope(AFM)system based on plate scanner is developed.We innovatively integrates two-dimensional plate scanner with one-dimensional feedback controller,which effectively overcomes the nonlinear cross-coupling error between Z feedback control and XY scan plane in the traditional scanner,and furthermore guarantees the stability of detection beam path with large scan range.The scan comparison experiments of the alumina films and the optical gratings have been done by using the system and the traditional AFM respectively.The results indicate that the regular images of the sample surface with no distortion are successfully gained.