Nano-fabrication System Based on Atomic Force Microscopy

ZHU Ji-mu,ZHANG Hai-jun,ZHANG Dong-xian
DOI: https://doi.org/10.3969/j.issn.1005-5630.2005.02.017
2005-01-01
Abstract:A new nano-fabrication system based on AFM is presented. Using this system,a sophisticated pattern can be obtained on the surface of Al_2O_3,getting the pattem from a picture by software to control the precise steps of the cantilever and the tip. The no-linear aberration of piezo-tube is corrected by software of this system.In the experiment, structure of nano-scale is obtained, and more sophisticated nano elements can be obtained in further research.
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