Abstract:Scanning tunneling microscope (STM) has presented a revolutionary methodology to the nanoscience and nanotechnology. It enables imaging the topography of surfaces, mapping the distribution of electronic density of states, and manipulating individual atoms and molecules, all at the atomic resolution. In particular, the atom manipulation capability has evolved from fabricating individual nanostructures towards the scalable production of the atomic-sized devices bottom-up. The combination of precision synthesis and in situ characterization of the atomically precise structures has enabled direct visualization of many quantum phenomena and fast proof-of-principle testing of quantum device functions with real-time feedback to guide the improved synthesis. In this article, several representative examples are reviewed to demonstrate the recent development of atomic scale manipulation. Especially, the review focuses on the progress that address the quantum properties by design through the precise control of the atomic structures in several technologically relevant materials systems. Besides conventional STM manipulations and electronic structure characterization with single-probe STM, integration of multiple atomically precisely controlled probes in a multiprobe STM system vastly extends the capability of in situ characterization to a new dimension where the charge and spin transport behaviors can be examined from mesoscopic to atomic length scale. The automation of the atomic scale manipulation and the integration with the well-established lithographic processes would further push this bottom-up approach to a new level that combines reproducible fabrication, extraordinary programmability, and the ability to produce large-scale arrays of quantum structures.

Fabricating Artificial Nanostructures with a Scanning Tunneling Microscope

Fabricating Artificial Nanowells with Tunable Size and Shape by Using Scanning Tunneling Microscopy

Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures.

Nano-fabrication System Based on Atomic Force Microscopy

Building Pb Nanomesas with Atomic-Layer Precision.

Atomic-scale manipulation and in situ characterization with scanning tunneling microscopy

Study on the Delicate Nanostructures Formed on Au(111) by Scanning Tunneling Microscopy (STM)

Fabrication Of Quantum Devices By Angstrom-Level Manipulation Of Nanoparticles With An Atomic Force Microscope

AFM Tip-Based Fabrication of Silicon Nanostructures with Reduced Subsurface Amorphous Layers

CHARACTERIZATION AND MANIPULATION OF NANOSTRUCTURES BY A SCANNING TUNNELING MICROSCOPE

Investigation of Artificial Quantum Structures Constructed by Atom Manipulation

Fabrication of Quantum Devices by Ångström-level Manipulation of Nanoparticles with an Atomic Force Microscope

Fabrication of Nanostructures on Si Surface Using Gold Nanoparticle Mask

Fabrication of Ultrafine Nanostructures

SPM-based Nanofabrication Using a Synchronization Technique

Fabrication of Nanostructures on the Surface of Titanium Film Using SPM Nanolithograpy Technique

Fabrication Techniques of Nano-Structure

3‐D Nanofabrication of Silicon and Nanostructure Fine‐Tuning via Helium Ion Implantation

The Atomic Drill Bit: Precision Controlled Atomic Fabrication of 2D Materials

Fabrication Of Ultrafine Nanostructures With Single-Nanometre Precision In A High-Resolution Transmission Electron Microscope

Manufacturing Structures in Nanometer Scale by Nanomanipulation