Abstract:To study the fabrication of nanostructures with high precision in a large scale using AFM anodic oxidation, a novel nanomachining system integrating AFM with a high precision stage was developed. The AFM conductive tip was still and the tip motion perpendicular to the sample surface was adjusted by AFM control system. Thus the tip can trace the sample surface and the sample surface can be oxidized. The stage was controlled by an outer computer to perform complex motions. Two types of motion can be realized based on this system: the vector motion and the lattice motion. Results show that the shortcoming of low accuracy of repetitive positioning within a large scale can be overcomed by the nonlinearity and hysteresis of AFM PZT . Anodic oxidation experiments on the surface of N-Si (111), were carried out in air. Variations of height of oxidation nanostructures influenced by the voltage between the tip and sample, the machining speed and the pulse interval were achieved and the highest machining speed of machining a nanoline was 60 μm/s. Therefore, complex nanostructures such as the line-type structure and Chinese words with a larger scale can be fabricated based on the developed system using the anodic oxidation method.

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