Abstract:The preparation technologies of nano-structures were reviewed in this paper, included nano-fabrication and self-assembled growth technique. With the down sizing of present silicon IC technology validity of Moore's law has become seemingly limited, because the feature size of Si ULSI has reached nanometer regime. It is unavoidable that quantum effects play very important role in the nano-architectures. Microelectronic industry faces the severe challenge and opportunities. However, it IS undoubted that the novel materials, for example, carbon nanotubes, will provide some solution for future nano-scaling architectures and devices, such as CNT-FET, but it is still a question whether CNT-based technology will actually contribute to the existing CMOS technology or it is totally new device architecture from CMOS technology. The Si-based quantum devices, included electronic and optoelectronic devices, are presented in this paper, they are based on quantum effects and fabricated by the processing compatible with Si IC technology.

Fabrication Techniques of Nano-Structure

Fabrication of nano-structure and study of Si-based single electron transistor

Nano-Fabrication and Nano-Electron Devices

Nanostructures and Nanodevices Special Fabrication and Characterization

Silicon Nano-Wire Fabricated by Boe Silicon Etching

Nano Electrical Devices and Integration

Advancing in Research of One-dimensional Silicon Nano-materials

Fabrication of Carbon Nanotubes on Interdigitated Metal Electrode for Switchable Nanophotonic Devices

Fabrication of ZnO/Al2O3 core–shell nanostructures and crystalline Al2O3 nanotube

Fabricating Artificial Nanostructures with a Scanning Tunneling Microscope

Fabrication And Characteristics Of A Si Multiple-Quantum Dots Single Electron Transistor On Simox Substrate

Nanoelectronics, Circuits and Nanoprocessors

Fabrication and Characterization of a Single Electron Transistor Based on a Silicon-on-Insulator

Top-down Fabricated Silicon-Nanowire-based Field-Effect Transistor Device on a (111) Silicon Wafer.

Advances In Si-Based Nanotechnology And Quantum Devices

Application of Micro/Nanofabrication Techniques to On‐Chip Molecular Electronics

Fabrication of silicon quantum wires by conventional silicon processing

Electron Beam Lithography Application on the Nanofabrication and Nanodevice

3-D matrix nano-wire transistor fabrication on silicon substrate

Fabrication And Characterization Of Single Electron Transistor On Soi

Fabrication of Conducting Si Nanowire Arrays