Sen Gao,Sanghyun Hong,Soohyung Park,Hyun Young Jung,Wentao Liang,Yonghee Lee,Chi Won Ahn,Ji Young Byun,Juyeon Seo,Myung Gwan Hahm,Hyehee Kim,Kiwoong Kim,Yeonjin Yi,Hailong Wang,Moneesh Upmanyu,Sung-Goo Lee,Yoshikazu Homma,Humberto Terrones,Yung Joon Jung

Abstract:The need for miniaturized and high-performance devices has attracted enormous attention to the development of quantum silicon nanowires. However, the preparation of abundant quantities of silicon nanowires with the effective quantum-confined dimension remains challenging. Here, we prepare highly dense and vertically aligned sub-5 nm silicon nanowires with length/diameter aspect ratios greater than 10,000 by developing a catalyst-free chemical vapor etching process. We observe an unusual lattice reduction of up to 20% within ultra-narrow silicon nanowires and good oxidation stability in air compared to conventional silicon. Moreover, the material exhibits a direct optical bandgap of 4.16 eV and quasi-particle bandgap of 4.75 eV with the large exciton binding energy of 0.59 eV, indicating the significant phonon and electronic confinement. The results may provide an opportunity to investigate the chemistry and physics of highly confined silicon quantum nanostructures and may explore their potential uses in nanoelectronics, optoelectronics, and energy systems.

Fabrication of silicon quantum wires by conventional silicon processing

Fabrication of Silicon Quantum Wires by Anisotropic Wet Chemical Etching and Thermal-Oxidation

Realization of Silicon Quantum Wires by Selective Chemical Etching and Thermal Oxidation

Silicon quantum wire array embedded in silicon dioxide

Realization of Silicon Quantum Wires Based on Si/SiGe/Si Heterostructure

Selective etching of n-type silicon in pn junction structure in hydrofluoric acid and its application in silicon nanowire fabrication.

Silicon Nano-Wire Fabricated by Boe Silicon Etching

Silicon Nano-Wires Fabricated by Thermal Evaporation of Silicon Wafer

Silicon Nano-Wires Fabricated by a Novel Thermal Evaporation of Zinc Sulfide

Tiny SiO2 nano-wires synthesized on Si (1 1 1 ) wafer

Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers

Tiny SiO2 nano-wires synthesized on Si (111) wafer

Silicon nano-wires grown at low temperature

Tiny silicon nano-wires synthesis on silicon wafers

Si1-Xgex/Si Multiple Quantum Well Wires Fabricated Using Selective Etching

Catalyst-free synthesis of sub-5 nm silicon nanowire arrays with massive lattice contraction and wide bandgap

Sil−xGex/Si Multiple Quantum Well Wires Fabricated Using Selective Etching

N-Type Area of PN Junction Etched in BOE Solution

Fabrication of Silicon Nano-Wire by Oxidation

Fabrication of Stable Metallic Nanowires with Quantized Conductance

Fabrication Techniques of Nano-Structure