Sen Gao,Sanghyun Hong,Soohyung Park,Hyun Young Jung,Wentao Liang,Yonghee Lee,Chi Won Ahn,Ji Young Byun,Juyeon Seo,Myung Gwan Hahm,Hyehee Kim,Kiwoong Kim,Yeonjin Yi,Hailong Wang,Moneesh Upmanyu,Sung-Goo Lee,Yoshikazu Homma,Humberto Terrones,Yung Joon Jung

Abstract:The need for miniaturized and high-performance devices has attracted enormous attention to the development of quantum silicon nanowires. However, the preparation of abundant quantities of silicon nanowires with the effective quantum-confined dimension remains challenging. Here, we prepare highly dense and vertically aligned sub-5 nm silicon nanowires with length/diameter aspect ratios greater than 10,000 by developing a catalyst-free chemical vapor etching process. We observe an unusual lattice reduction of up to 20% within ultra-narrow silicon nanowires and good oxidation stability in air compared to conventional silicon. Moreover, the material exhibits a direct optical bandgap of 4.16 eV and quasi-particle bandgap of 4.75 eV with the large exciton binding energy of 0.59 eV, indicating the significant phonon and electronic confinement. The results may provide an opportunity to investigate the chemistry and physics of highly confined silicon quantum nanostructures and may explore their potential uses in nanoelectronics, optoelectronics, and energy systems.

Realization of Silicon Quantum Wires by Selective Chemical Etching and Thermal Oxidation

Fabrication of Silicon Quantum Wires by Anisotropic Wet Chemical Etching and Thermal-Oxidation

Realization of Silicon Quantum Wires Based on Si/SiGe/Si Heterostructure

Fabrication of silicon quantum wires by conventional silicon processing

Silicon quantum wire array embedded in silicon dioxide

Selective etching of n-type silicon in pn junction structure in hydrofluoric acid and its application in silicon nanowire fabrication.

Silicon Nano-Wires Fabricated by a Novel Thermal Evaporation of Zinc Sulfide

Silicon Nano-Wires Fabricated by Thermal Evaporation of Silicon Wafer

Fabrication of Silicon Nano-Wire by Oxidation

Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers

Tiny SiO2 nano-wires synthesized on Si (1 1 1 ) wafer

Tiny SiO2 nano-wires synthesized on Si (111) wafer

Silicon Nano-Wire Fabricated by Boe Silicon Etching

Si1-Xgex/Si Multiple Quantum Well Wires Fabricated Using Selective Etching

Catalyst-free synthesis of sub-5 nm silicon nanowire arrays with massive lattice contraction and wide bandgap

Sil−xGex/Si Multiple Quantum Well Wires Fabricated Using Selective Etching

Study on Thermal Oxidation of Si Nanowires

Design and fabrication of a nanofluidic channel by selective thermal oxidation and etching back of silicon dioxide made on a silicon substrate

Fabrication of Vertically Stacked Single-Crystalline Si Nanowires Using Self-Limiting Oxidation

Silicon nanowires fabricated by thermal evaporation of silicon monoxide

Silicon nano-wires grown at low temperature