Abstract:Developing a scalable method to fabricate atomic wires is an important step for building solid-state semiconductor quantum computers. In this work, we developed a selective doping strategy by patterning the self-assembled monolayer to a few nanometers using standard nanofabrication processes, which significantly improves the lateral doping resolution of monolayer doping from microscale to nanoscale. Using this method, we further explore the possibility to fabricate phosphorus wires in silicon by patterning self-assembled diethyl vinylphosphonate monolayers into lines with a width ranging from 500 to 10 nm. The phosphorus dopants are driven into silicon by rapid thermal annealing, forming dopant wires. Four-probe and Hall effect measurements are employed to characterize the dopant wires. The results show that the conductance is linear with the width for the wires, showing the success of the monolayer patterning process to nanoscale. To fabricate atomic wires made of one or a few lines of phosphorus atoms, we need to significantly shorten the thermal diffusion length and increase the dopant incorporation rate at the same time. Pulsed laser annealing may be a promising solution. The present work provides a promising pathway for mass fabrication of atomic wires in silicon that may find important applications in quantum computing.

Silicon quantum wire array embedded in silicon dioxide

Fabrication of Silicon Quantum Wires by Anisotropic Wet Chemical Etching and Thermal-Oxidation

Fabrication of silicon quantum wires by conventional silicon processing

Realization of Silicon Quantum Wires by Selective Chemical Etching and Thermal Oxidation

Realization of Silicon Quantum Wires Based on Si/SiGe/Si Heterostructure

Silicon nano-wires grown at low temperature

Silicon Nano-Wires Fabricated by Thermal Evaporation of Silicon Wafer

Selective etching of n-type silicon in pn junction structure in hydrofluoric acid and its application in silicon nanowire fabrication.

Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers

Silicon Nano-Wire Fabricated by Boe Silicon Etching

Photoluminescence of a silicon quantum wire array fabricated by electrolytic etching

Tiny SiO2 nano-wires synthesized on Si (1 1 1 ) wafer

Tiny SiO2 nano-wires synthesized on Si (111) wafer

Silicon Nano-Wires Fabricated by a Novel Thermal Evaporation of Zinc Sulfide

OS1503 Development of Highly Ordered Silicon Nanowire Array

Catalyst-free synthesis of sub-5 nm silicon nanowire arrays with massive lattice contraction and wide bandgap

Array-orderly single crystalline silicon nano-wires

Tiny silicon nano-wires synthesis on silicon wafers

Toward Scalable Fabrication of Atomic Wires in Silicon by Nanopatterning Self-Assembled Molecular Monolayers

N-Type Area of PN Junction Etched in BOE Solution

Nanoscale Silicon Wires Synthesized Using Simple Physical Evaporation