Nano-Fabrication and Nano-Electron Devices

LIU Ming,XIE Chang-qing,WANG Cong-shun,LONG Shi-bing,LI Zhi-gang,YILI Cheng-rong,TU De-yu
DOI: https://doi.org/10.3969/j.issn.1671-4776.2005.09.001
2005-01-01
Abstract:Some progress on top-down nano-fabrication, such as electron beam lithography,X-ray lithography and EUV lithography were introduced. The progress and challenge on quantum mechanism nano-devices such as SET, RTD and molecular device were also investigated.
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