Discovery and discussion of low frequency vibration of four-segment piezo-tube

Xiumei Liu,Jia Wang,Lin Ding,Dacheng Li
1998-01-01
Abstract:Scanning parameters of four-segmented piezo-tube can be characterized by an optical interferometer. During the measurement, decay vibration with several period is observed when the tube is driven by square wave. The vibration frequency is much lower than the lowest calculated resonant frequency based on the reported formula. This will result in tip vibration together with the tube. Quality of optical image will be degraded and the scanning velocity will be limited greatly. However, the research shows that the vibration is determined by piezo-tube itself. How to reduce the influence of low frequency vibration is one of the key problems for achieving high-resolution image.
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