Micro-vibration measuring technology based on heterodyne interference

Dan Liu,Bin Zheng,Hualing Guo,Hui Liu,Naiqiang Liu
DOI: https://doi.org/10.5768/JAO201435.0503006
2014-01-01
Journal of Applied Optics
Abstract:Aiming at the problem that the micro-vibration based on heterodyne interference has low stability and is easily impacted by environmental noise ,the ideas of optical path improve-ment were given .According to the difference principle ,the single optical path was converted to a double optical path ,in which the environmental noise was eliminated ;The elliptically po-larized light was changed into linearly polarized light to improve the interference signal ampli-tude by the polarization splitting prism (PBS);The acousto-optic modulator(AOM ) was im-proved to inhibit frequency drift ;The stray light was suppressed by using diaphragm filters so as to improve the system signal-noise ratio (SNR) .The verification experiments were conduc-ted through detecting 5 kHz piezoelectric vibration signal and 2 .5 M Hz laser ultrasonic signal . Experimental results indicate that signal is stable and has no ripple ,the resolution is 2 .3 nm and the SNR has improved by 16 .7 times .The amplitudes of double-channel heterodyne inter-ferometer signal is 552 mV and 736 mV ,respectively ,which are larger than traditional one nearly 10 times ,it is advantageous to measure nanometer micro-vibration signals .
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