A High-Frequency Angular Vibration Calibration System Based on Phase Modulated Laser Interferometer Technique

Xianfan Wang,Jianhua Yang,Tengchao Huang,Xiaowu Shu
DOI: https://doi.org/10.1117/12.2602614
2021-01-01
Abstract:In this paper, we proposed a high-frequency angular vibration calibration system based on phase modulated laser interferometer technique, which can provide the real-time rotation angle measurement with vibration frequency of up to 1000Hz. The optical configuration, operation principle, and phase generation carrier demodulation (PGC) technique of this calibration system are presented. Both theoretical and experimental results demonstrate that our proposed angular vibration calibration system can realize an angle measurement with an amplitude of 0.3 '' at angular frequency of 1000Hz.
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