Abstract:Developing a miniatured laser vibrometer becomes important for many engineering areas, such as experimental and operational modal analyses, model validation, and structural health monitoring. Due to its compact size and light weight, a miniatured laser vibrometer can be attached to various mobilized platforms, such as an unmanned aerial vehicle and a robotic arm whose payloads can usually not be large, to achieve a flexible vibration measurement capability. However, integrating optics into a miniaturized laser vibrometer presents several challenges. These include signal interference from ghost reflectance signals generated by the sub-components of integrated photonics, polarization effects caused by waveguide structures, wavelength drifting due to the semiconductor laser, and the poorer noise characteristics of an integrated laser chip compared to a non-integrated circuit. This work proposes a novel chip-based high-precision laser vibrometer by incorporating two or more sets of quadrature demodulation networks into its design. An additional set of quadrature demodulation networks with a distinct reference arm delay line length can be used to conduct real-time compensation to mitigate linear interference caused by temperature and environmental variations. A series of vibration measurements with frequencies ranging from 0.1 Hz to 1 MHz were conducted using the proposed laser vibrometer to show its repeatability and accuracy in vibration and ultrasonic vibration measurements, and its robustness to test surface conditions. The proposed laser vibrometer has the advantage of directly measuring the displacement response of a vibrating structure rather than integrating its velocity response to yield the measured displacement with a conventional laser Doppler vibrometer.

Laser Doppler vibration analysis of miniaturized piezoelectric scanning structure

Vibration Compensating Beam Scanning Interferometer for Surface Measurement

Two-Dimensional Optical Scanning of A Piezoelectric Cantilever Actuator

Design and Analysis of a Piezo-Actuated Flexure-Based Scanning System in ECDLs

A Two-Dimensional Micro Scanner Integrated With A Piezoelectric Actuator And Piezoresistors

Study of piezo-induced surface vibration in solids using atomic force probe

Noncontact Intelligent Vibrometer Based on Laser Triangulation

Laser dot projection videogrammetry for vibration measurement and control of a piezoelectric flexible cantilever plate

3.8×3.8 mm2 compact piezoelectric resonant MEMS scanner using fork-shaped and ring-shaped actuators

3.8×3.8 mm2 Tiny Piezoelectric Resonant MEMS Scanner Using Fork-Shaped and Ring-Shaped Actuators

Development and Validation of a New Type of Displacement-Based Miniatured Laser Vibrometers

Laser Trigonometry Measurement System of Micro Cantilever Vibration

Applications of Laser Vibrometer in Vibration Measurement of Microstructures

Wide Angle and High Frequency Resonant Piezoelectric MEMS Mirror for Laser Beam Scanning Application

Vibration detection technology research based on piezoelectric cantilever

Micro-vibration measuring technology based on heterodyne interference

All-optical dynamic analysis of the photothermal and photoacoustic response of a microcantilever by laser Doppler vibrometry

A Displacement Sensor Combining Cavity Tuning of A Laser with A Piezoelectric Transducer'S Subdivision Technique for A Bidirectional Sampling on the Rising and Falling Flanks

Flexural Resonance Vibrations of Piezoelectric Ceramic Tubes in Besocke-Style Scanners

A 2D Resonant MEMS Scanner with an Ultra-Compact Wedge-Like Multiplied Angle Amplification for Miniature LIDAR Application

Electric-Force Conversion Performance of Si-Based LiNbO3 Devices Based on Four Cantilever Beams