Abstract:We demonstrate an interferometric piezoresponse force microscopy (PFM) method for quantifying the full, three-dimensional response of piezoelectric material without requiring sample rotation. We show that this approach yields quantitative 3D measurement independent of the sample orientation beneath the tip. This approach simplifies existing, angle-resolved PFM techniques, since it only requires four measurements (or three with less redundancy and error checking) to map the full three dimensional, time independent strain field. It also does not require rotating the sample with respect to the cantilever. It benefits from the greatly reduced noise floor of our laser doppler vibrometer interferometric displacement sensor (IDS) of 50fm per rootHz or our quadrature phase differential interferometer (QPDI) noise floor of 5fm per rootHz and the intrinsic accuracy of interferometric measurements. One important result is that the in-plane piezo sensitivities were systematically smaller than the vertical by a factor of 2 to 3. A simple analysis of vertical and lateral contact stiffnesses, due to the difference in the Young (vertical) and Shear (lateral) sample moduli predicts a factor of 2.5, in good agreement with the measurements. Finally, we fit observed OBD measurements to a linear combination of interferometrically measured in-plane and vertical responses for four different ferroelectric samples. We found that the in-plane response accounted for 20% or more of the OBD response and surprisingly, in two out of the four samples, the in-plane contribution was in fact 2x larger than the vertical.

Improvement and Application of Scanning Near Field Optical Microscope Based on A Piezoelectric Bimorph Shear Force Beam

Vibration Compensating Beam Scanning Interferometer for Surface Measurement

Active Bimorph-Based Tapping-Mode Distance Control for Scanning Near-Field Optical Microscopy of Biological Samples in Liquid

Dynamic Behavior of Tuning Fork Shear-Force Structures in a SNOM System

A novel ultrasonic resonance sample-tip distance regulation for near field optical microscopy and shear force microscopy

A Novel Non-Optical Method of Tip-Sample Distance Regulation Based on Shear Force in Scanning Near-Field Optical Microscopy

A compact fluorescence and polarization near-field scanning optical microscope

Study of piezo-induced surface vibration in solids using atomic force probe

Shear Force Detection Using Single-Tine Oscillating Tuning Fork for Scanning Near-Field Optical Microscopy

A compact CCD-monitored atomic force microscope with optical vision and improved performances.

Compound Three-dimensional Piezoelectric Scanner Used in Scanning Probe Microscopy

Design and Control of a Novel 3-D Piezoelectric Scanning Coaxial Optical Microscope System

Ultrasonic resonance regulated near-field scanning optical microscope and laser induced near-field optical-force interaction

Research On The Sensing Performance Of The Tuning Fork-Probe As A Micro Interaction Sensor

Mechanism for Shear-force Between Tip and Sample in NSOM and TSM

Design and Applications of a Multi-Mode Scanning Near-Field Optical Microscope

Mirrorless MEMS imaging: a nonlinear vibrational approach utilizing aerosol-jetted PZT-actuated fiber MEMS scanner for microscale illumination

Setup and Application of Scanning Near-Field Optical Microscopy

Instrumentation for dual-probe scanning near-field optical microscopy

Improvement of Tapping-Mode Scanning Near-Field Optical Microscope

Accurate 3D Nanoscale Electromechanical Imaging with a Metrological Atomic Force Microscope