Mirrorless MEMS imaging: a nonlinear vibrational approach utilizing aerosol-jetted PZT-actuated fiber MEMS scanner for microscale illumination

Wei-Chih Wang,Ming-Yao Li,Kuan-Chang Peng,Yi-Feng Hsu,Benjamin Estroff,Pao-Yun Yen,David Schipf,Wen-Jong Wu

DOI: https://doi.org/10.1038/s41378-023-00646-5

2024-01-22

Microsystems & Nanoengineering

Abstract:Abstract This study introduces a novel image capture and lighting techniques using a cutting-edge hybrid MEMS scanner system designed for compact microscopic imaging. The scanner comprises a tapered optical fiber waveguide and innovative aerosol-jet printed PZT (lead zirconate titanate) bimorph push-pull actuators on a stainless-steel substrate, effectively addressing issues that are commonly associated with PZT on silicon substrates such as fracture and layer separation. By leveraging nonlinear vibration, the scanner achieves a spiral scan pattern from a single signal input, in addition to the expected two-dimensional scanning and target illumination from two phase-shifted inputs. This capability is further enhanced by a novel process to taper the optical fiber, which reduces illumination scattering and tunes the fiber to the resonant frequencies of the scanner. The precisely tapered tip enables large fields of view while maintaining independent 2-axis scanning through one-degree-of-freedom actuation. Experimental validation showcases the successful generation of a spiral scan pattern with a 60 μm diameter scan area and a 10 Hz frame rate, effectively reconstructing scanned images of 5 μm lines, cross patterns (15 μm in length with a 5 μm gap), and structures of a Psychodidae wing.

nanoscience & nanotechnology,instruments & instrumentation

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to develop a new type of micro - scanning imaging technology to overcome the complexity and volume limitations in the existing micro - scanning mirror (MEMS scanning mirror) designs. Specifically, the research team proposed a mirror - less MEMS imaging system. This system utilizes a fiber - optic scanner driven by jet - deposited piezoelectric material (PZT), achieving a spiral scanning mode under single - signal input through non - linear vibration, and achieving two - dimensional scanning and target illumination through two phase - shifted inputs. This design aims to simplify the overall structure, reduce production costs, while maintaining or improving the imaging quality.

### Key Issues
1. **Simplified Design**: Traditional MEMS scanning mirrors usually rely on complex mirror designs, which increase the manufacturing difficulty and cost. The solution proposed in this paper simplifies the design and reduces the production steps by using a single - degree - of - freedom actuator to drive fiber - optic scanning.
2. **Cost Reduction**: By simplifying the design and using more efficient manufacturing processes (such as jet - deposition), the production cost is reduced.
3. **Increased Flexibility**: This design allows for a larger field of view and independent two - axis scanning without increasing the system volume.
4. **Improved Resolution**: By optimizing the shape and resonance frequency of the fiber, the resolution and imaging quality of the scanning system are improved.

### Technical Details
- **Material Selection**: 301 stainless steel is used as the base material instead of the traditional silicon base, which improves the flexural displacement and mechanical support of the device.
- **Actuator Design**: A jet - deposited PZT double - layer push - pull actuator is adopted, achieving large bending displacement by applying opposite electric fields.
- **Fiber Processing**: The fiber is tapered gradually by the chemical etching method to reduce light scattering and optimize the beam profile and line resolution.
- **Non - linear Vibration**: The non - linear vibration characteristics are utilized to achieve a spiral scanning mode under single - signal input and two - dimensional scanning under two phase - shifted inputs.

### Experimental Verification
- **Frequency Response Testing**: The frequency response of the actuator is measured by a laser Doppler vibrometer to determine its natural frequency and operating frequency range.
- **Scanning Mode Verification**: The experiment shows the successful generation of a spiral scanning mode with a diameter of 60 μm, and the reconstruction of 5 μm lines, cross - patterns (15 μm long, 5 μm spacing) and the structural image of Psychodidae wings at a frame rate of 10 Hz.

In conclusion, through innovative design and manufacturing processes, this paper proposes a new type of mirror - less MEMS imaging system, which solves the problems of complexity and volume limitations in existing technologies and provides a new solution for compact microscopic imaging.