Dual-Servo Mechanism of STM for Measurement of Sub Millimeter Deep Trench Structures

Wei Zhang,Chao Jin,Yuan-Liu Chen,Bing-Feng Ju
DOI: https://doi.org/10.4028/www.scientific.net/amr.497.146
2012-01-01
Advanced Materials Research
Abstract:This paper presents a new control method of the Z-direction module of STM (scanning tunnel microscope). The major component of our method is a dual-servo mechanism, which is consist of a PZT (Piezoelectric Transducer) and a motorized micro displacement stage. Traditionally, STM employs PZT as the servo scanner, which provides very high precision but has a small range. The mean idea of our method is compensating the insufficient measuring range of the PZT through a motorized micro displacement stage. Our method succeeds to eliminates the limitation of measuring range of PZT and enlarges the vertical measurement scale of STM from sub-micrometer to sub-millimetre.
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