Scanning tunneling microscopy-based on-machine measurement for diamond fly cutting of micro-structured surfaces

wule zhu,shunyao yang,bingfeng ju,jiacheng jiang,anyu sun
DOI: https://doi.org/10.1016/j.precisioneng.2015.08.011
IF: 3.315
2016-01-01
Precision Engineering
Abstract:•The STM-based on-machine measurement system was newly developed on the diamond machine, with extended scanning range and nanoscale resolution.•It is capable of scanning difficult-to-measure surfaces with slopes of 45° and size of tens of micrometers.•It provides an efficient on-machine measurement during the fly cutting process to characterize the machined surface form.•Through the feedback of on-machine measured results, the fly cutting micro-structured surface form was significantly improved.
What problem does this paper attempt to address?