Dual Tunneling Unit Scanning Tunneling Microscope for Nano-Metrology

Zhang Dong-xian,Feng Huang

2000-01-01

Abstract:A dual tunneling unit scanning tunneling microscopc(DTU-STM) is developed for nano-metrology.This article describes the measurement concept and the instrument of the DTU-STM.The crystalline lattice images were scanned by the DTU-STM to check the feasibility of nano-metrology.One metrological result of test sample image was provided.

What problem does this paper attempt to address?

Dual imaging unit scanning tunneling microscope for NANO-metrology based on atomic reference scale

Haijun Zhang,Lan Wu,Feng Huang

1998-01-01

Abstract:A dual imaging unit scanning tunneling microscope ( DIU - STM ) is developed. It simultaneously scans a reference sample (crystalline lattice)and a test sample by using one single XY scanner. The size of the test sample image can be precisely measured by counting the number of lattices. This article describes the measurement concept and the insturment of DIU.- STM. The crystalline lattice images of two HOPG chips are scanned by the DIU-STM to check the feasibility of nano-metrology based on the atomic reference scale. One metrological result of test sample image based on HOPG lattices is provided.
A wide-range metrology AFM and its applications

XiaoFeng Lin,Haijun Zhang,Dongxian Zhang

DOI: https://doi.org/10.1117/12.576240

2005-01-01

Abstract:In view of the fact that the application field of a dual tunneling-unit scanning tunneling microscope (DTU-STM) was strongly limited by sample conductivity, a dual imaging unit atomic force microscope (DIU-AFM) was developed for wide-range nano-metrology. A periodic grating is employed as a reference sample. The DIU-AFM simultaneously scans the grating and a test sample by using one single XY scanner. Their images thus have the same lateral size, and the length of the test sample image can be precisely measured by counting the number of periodic features of the reference grating. We further developed a new method of implementing wide-range nano-metrology. By alternatively moving the XY scanner in the X direction using a step motor, a series of pairs of images are obtained and can be spliced into two wide-range reference and test ones, respectively. Again, the two spliced images are of the same size, and the length of test image can be measured based on the reference grating features. In this way, wide-range metrology with nanometer order accuracy is successfully realized.
Long Range And Accurate Measurement Of Deep Trench Microstructures By A Specialized Scanning Tunneling Microscope

Bing-Feng Ju,Yuan-Liu Chen,Wei Zhang,Wule Zhu,Chao Jin,F Z Fang

DOI: https://doi.org/10.1063/1.4721273

IF: 1.6

2012-01-01

Review of Scientific Instruments

Abstract:A compact but practical scanning tunneling microscope (STM) with high aspect ratio and high depth capability has been specially developed. Long range scanning mechanism with tilt-adjustment stage is adopted for the purpose of adjusting the probe-sample relative angle to compensate the non-parallel effects. A periodical trench microstructure with a pitch of 10 mu m has been successfully imaged with a long scanning range up to 2.0 mm. More innovatively, a deep trench with depth and step height of 23.0 mu m has also been successfully measured, and slope angle of the sidewall can approximately achieve 67 degrees. The probe can continuously climb the high step and exploring the trench bottom without tip crashing. The new STM could perform long range measurement for the deep trench and high step surfaces without image distortion. It enables accurate measurement and quality control of periodical trench microstructures. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4721273]
A novel scanning tunneling microscopy for long range and high aspect ratio measurement

Yuanliu Chen,Bingfeng Ju

2010-01-01

Abstract:To improve the metrological characteristics of the measurement technique scanning probe microscopy by broadening its measuring range as well as increasing its high aspect ratio measuring capability, a new STM has been developed. A dual-stage servo instead of 3D PZT tube scanner is arranged such that for features within the range of the fast actuator, both long range and high speed. The raster scanning is achieved by two linear stages that driven by servo-motors. Each of the stage has a travel stroke of 25 mm, a maximum speed of 1.5 mm/s and a minimum incremental motion of 10 nm. A PZT actuator mounted onto the raster scanning stage serves as fast feedback servo for operation on constant current mode. Also in order to enable the STM to measure high aspect ratio micro structures, STM probe with high aspect ratio up to 450:1 has been developed and integrated into the new STM. Using this new STM system, a long range of 500 μm line scanning and a 300 μm× 300 μm 3D surface scanning has been successfully achieved. A trench with a depth of 2.8 μm has also been faithfully measured.
Dual imaging-unit atomic force microscope for nanometer order length metrology based on reference scales

Haijun Zhang,Dongxian Zhang,Xiaofeng Lin

DOI: https://doi.org/10.1116/1.1502700

2002-01-01

Abstract:This article reports results from a dual imaging-unit atomic force microscope (DIU-AFM) used for length metrology based on reference scales. The DIU-AFM, suitable for most samples with different conductivity, was developed in view of the fact that the application field of a dual tunneling-unit scanning tunneling microscope was strongly limited by sample conductivity. Two atomic force microscopy (AFM) units were combined in the DIU-AFM, one as a reference unit; and the other a test one. Their probes with Z piezoelements and tips were horizontally set in parallel at the same height to reduce errors due to geometric asymmetry. A reference sample and a test sample were attached to one single XY scanner on same surface, and were imaged by the AFM units at the same time. The two images have the same lateral size, and thus, the length of the test sample image could be accurately measured by counting the periodic features in the reference one. The most remarkable advantages of the DIU-AFM include: Scanning errors caused by the nonlinearity or hysteresis of the piezoscanner can be successfully avoided; moreover, it is able to measure conductive and/or nonconductive samples. We present a discussion about the setup and control of the DIU-AFM. Some comparison experiments, respectively, using periodic features of porous alumina film and grating as reference scales were demonstrated for simultaneous length calibration. Experiments show a satisfactory result of matching and calibration between the two imaging units when covering a wide scan range up to 8 mum. On the basis of different reference scales, the DIU-AFM is capable of realizing nanometer and/or submicron accuracy length metrology of test samples with any conductivity. (C) 2002 American Vacuum Society.
Dual-Servo Mechanism of STM for Measurement of Sub Millimeter Deep Trench Structures

Wei Zhang,Chao Jin,Yuan-Liu Chen,Bing-Feng Ju

DOI: https://doi.org/10.4028/www.scientific.net/amr.497.146

2012-01-01

Advanced Materials Research

Abstract:This paper presents a new control method of the Z-direction module of STM (scanning tunnel microscope). The major component of our method is a dual-servo mechanism, which is consist of a PZT (Piezoelectric Transducer) and a motorized micro displacement stage. Traditionally, STM employs PZT as the servo scanner, which provides very high precision but has a small range. The mean idea of our method is compensating the insufficient measuring range of the PZT through a motorized micro displacement stage. Our method succeeds to eliminates the limitation of measuring range of PZT and enlarges the vertical measurement scale of STM from sub-micrometer to sub-millimetre.
Scanning Tunneling Microscopy-Based in Situ Measurement of Fast Tool Servo-Assisted Diamond Turning Micro-Structures

Bing-Feng Ju,Wu-Le Zhu,Shunyao Yang,Keji Yang

DOI: https://doi.org/10.1088/0957-0233/25/5/055004

IF: 2.398

2014-01-01

Measurement Science and Technology

Abstract:We propose a new in situ measurement system based on scanning tunneling microscopy (STM) to realize spiral scanning of a micro-structure without removing it after fast tool servo (FTS) cutting. To avoid distortion of the machined and measured surface, the center alignment of the FTS tool and the STM tip was first implemented by an STM in situ raster scan of two circular grooves cut by the machine tool. To originally observe the machined surface, the trace of the STM tip is put in accord with that of the FTS by setting the same start and end points of cutting and scanning and the same feed rate, and both are triggered by the subdivided rotary encoder of the spindle of the diamond turning machine. The profile data of the in situ spiral scanning of the machined micro-lens array can be fed back to compensate the depth of the cut to guarantee sub-micron form accuracy after second machining. The efficient spiral scanning, proper matching and accurate evaluation results demonstrate that the proposed STM in situ measurement approach is of great significance to the fabrication process.
Scanning Tunneling Microscopy-Basedin Situmeasurement of Fast Tool Servo-Assisted Diamond Turning Micro-Structures

Bing‐Feng Ju,Wu-Le Zhu,Shunyao Yang,Yang Ke-ji

DOI: https://doi.org/10.1088/0957-0233/25/5/055004

2014-01-01

Abstract:We propose a new in situ measurement system based on scanning tunneling microscopy (STM) to realize spiral scanning of a micro-structure without removing it after fast tool servo (FTS) cutting. To avoid distortion of the machined and measured surface, the center alignment of the FTS tool and the STM tip was first implemented by an STM in situ raster scan of two circular grooves cut by the machine tool. To originally observe the machined surface, the trace of the STM tip is put in accord with that of the FTS by setting the same start and end points of cutting and scanning and the same feed rate, and both are triggered by the subdivided rotary encoder of the spindle of the diamond turning machine. The profile data of the in situ spiral scanning of the machined micro-lens array can be fed back to compensate the depth of the cut to guarantee sub-micron form accuracy after second machining. The efficient spiral scanning, proper matching and accurate evaluation results demonstrate that the proposed STM in situ measurement approach is of great significance to the fabrication process.
Ultrahigh Vacuum, Variable Temperature, Dual Scanning Tunneling Microscope System Operating under High Magnetic Field

Weiwei Cai,Fei Pang,Jian Wang,Hui Liu,X. J. Liang,Q. K. Xue,D. M. Chen

DOI: https://doi.org/10.1063/1.2746821

2007-01-01

Abstract:We present a dual scanning tunneling microscope (DSTM) system operating between 2.2K and room temperature, in a split-coil superconducting magnetic field up to 12T and in ultrahigh vacuum. The DSTM consists of two compact STMs, each having x, y, and z coarse positioning piezoelectric steppers with embedded capacitive positioning sensor for navigation. Each STM can be operated independently and can achieve atomic resolution. The DSTM and the sample is configured in a way that allows the magnetic field orientation to be varied continuously from normal to parallel to the sample surface. Together with the sample, the DSTM can form a nanometer scale three terminal setup for transport measurement.
Large-area profile measurement of sinusoidal freeform surfaces using a new prototype scanning tunneling microscopy

Yuanliu Chen,Wule Zhu,Shunyao Yang,Bingfeng Ju,Yue Ge

DOI: https://doi.org/10.1016/j.precisioneng.2013.12.008

IF: 3.315

2014-01-01

Precision Engineering

Abstract:•Newly developed STM system has large-area measuring capability.•Self-calibration methodology to avoid sample tilt during large area measurement.•Capable of large area as well as high amplitude measurement of microstructures.
Design and test of the nanostructure-reaccessible UHVSTM system

Sheng FANG,Zhao-hui ZHANG,Zheng GAI,Ru-guang ZHAO,Wei-sheng YANG

DOI: https://doi.org/10.3969/j.issn.1000-6281.1999.01.035

1999-01-01

Abstract:We report the design and test of the new UHVSTM system that consists of a scanning electron microscope (SEM) and a scanning tunneling microscope (STM), along with low energy electron diffraction (LEED), auger electron spectroscopy (AES), as well as some routine and special surface preparation facilities. The major advantage of this configuration lies in the fact that it offers the experimenter the possibility of scrutinizing the sample surface with SEM first and then guiding the STM tip to further examine interesting nanometer scale areas. In this sense the STM is nanostructure reaccessible.
Double-Tip Scanning Tunneling Microscope for Surface-Analysis

Q NIU,MC CHANG,CK SHIH

DOI: https://doi.org/10.1103/physrevb.51.5502

1994-01-01

Abstract:We explore the possibility of using a double-tip STM to probe the single electron Green function of a sample surface, and describe a few important applications: (1) Probing constant energy surfaces in $\k$-space by ballistic transport; (2) Measuring scattering phase shifts of defects; (3) Observing the transition from ballistic to diffusive transport to localization; and (4) Measuring inelastic mean free paths.
Scanning tunneling microscopy-based on-machine measurement for diamond fly cutting of micro-structured surfaces

wule zhu,shunyao yang,bingfeng ju,jiacheng jiang,anyu sun

DOI: https://doi.org/10.1016/j.precisioneng.2015.08.011

IF: 3.315

2016-01-01

Precision Engineering

Abstract:•The STM-based on-machine measurement system was newly developed on the diamond machine, with extended scanning range and nanoscale resolution.•It is capable of scanning difficult-to-measure surfaces with slopes of 45° and size of tens of micrometers.•It provides an efficient on-machine measurement during the fly cutting process to characterize the machined surface form.•Through the feedback of on-machine measured results, the fly cutting micro-structured surface form was significantly improved.
Long-range Scanning Tunneling Microscope for the study of nanostructures on insulating substrates

Aday Molina-Mendoza,José Gabriel Rodrigo,Joshua Island,Enrique Burzuri,Gabino Rubio-Bollinger,Herre S. J. van der Zant,Nicolás Agraït

DOI: https://doi.org/10.1063/1.4864196

2013-10-23

Abstract:The Scanning Tunneling Microscope is a powerful tool for studying the electronic properties at the atomic level, however it's relatively small scanning range and the fact that it can only operate on conducting samples prevents its application to study heterogeneous samples consisting on conducting and insulating regions. Here we present a long-range scanning tunneling microscope capable of detecting conducting micro and nanostructures on insulating substrates using a technique based on the capacitance between the tip and the sample and performing STM studies.

Mesoscale and Nanoscale Physics,Instrumentation and Detectors
Four-Probe Scanning Tunnelling Microscope with Atomic Resolution for Electrical and Electro-Optical Property Measurements of Nanosystems

X Lin,XB He,JL Lu,L Gao,Q Huan,DX Shi,HJ Gao

DOI: https://doi.org/10.1088/1009-1963/14/8/011

2005-01-01

Abstract:We demonstrate a special four-probe scanning tunnelling microscope (STM) system in ultrahigh vacuum (UHV), which can provide coarse positioning for every probe independently with the help of scanning electron microscope (SEM) and fine positioning down to nanometre using the STM technology. The system allows conductivity measurement by means of a four-point probe method, which can draw out more accurate electron transport characteristics in nanostructures and provides easy manipulation of low dimension materials. All measurements can be performed in variable temperature (from 30K to 500K), magnetic field (from 0 to 0.1T) and different gas environments. Simultaneously, the cathodoluminescence (CL) spectrum can be achieved through an optical subsystem. Test measurements using some nanowire samples show that this system is a powerful tool in exploring electron transport characteristics and spectra in nanoscale physics.
Wide-range length metrology by dual-imaging-unit atomic force microscope based on porous alumina.

Dongxian Zhang,Haijun Zhang,Xiaofeng Lin

DOI: https://doi.org/10.1002/jemt.20060

2004-01-01

Microscopy Research and Technique

Abstract:A new dual-imaging-unit atomic force microscope (DIU-AFM) was developed for wide-range length metrology. In the DIU-AFM, two AFM units were combined, one as a reference unit, and the other a test one. Their probes with Z piezo elements and tips were horizontally set in parallel at the same height to reduce errors due to geometric asymmetry. An XY scanner was attached to an XY block that was able to move in the X direction with a step of about 500 nm. A standard porous alumina film was employed as the reference sample. Both reference sample and test sample were installed at the center of the AT scanner on the same surface and were simultaneously imaged. The two images had the same lateral size, and thus the length of the test sample image could be accurately measured by counting the number of periodic features of the reference one. The XY block together with the XY scanner were next moved in the X direction for about 1.5 mum and a second pair of reference and test images were obtained by activating the scanner. In this way, a series of pairs of images were acquired and could be spliced into two wide-range reference and test images, respectively. Again, the two spliced images were of the same size and the length of test image was measured based on the reference one. This article presents a discussion about the structure and control of the DIU-AFM system. Some experiments were carried out on the system to demonstrate the method of length calculation and measurement. Experiments show a satisfactory result of wide-range length metrology based on the hexagonal features of the porous alumina with a periodic length of several tens of nanometers. Using this method the DIU-AFM is capable of realizing nanometer-order accuracy length metrology when covering a wide range from micron to several hundreds of microns, or even up to millimeter order. (C) 2004 Wiley-Liss, Inc.
Note: Symmetric Modulation Methodology Applied In Improving The Performance Of Scanning Tunneling Microscopy

Bing-Feng Ju,Wu-Le Zhu,Wei Zhang

DOI: https://doi.org/10.1063/1.4854476

IF: 1.6

2013-01-01

Review of Scientific Instruments

Abstract:A symmetric modulation methodology is proposed to combine robust control of external disturbance, rapid response to steep sidewalls with the high speed of a traditional scanning tunneling microscopy. The 1400 x 200 mu m(2) topography of a comb-like steep sidewalls micro-structure with the depth of 23 mu m was acquired at a high scanning speed of 120 mu ms-1 and the detectable slope angle is up to 85 degrees. The total measuring time was only 17 min. In addition, a 4 x 4 mm(2) aluminum dual-sinusoidal array has been successfully measured with a scanning speed up to 500 mu ms(-1). It improved the performance of the normal scanning tunneling microscope and enables efficient and stable measurement of large-area complex micro-structures, and thus can be introduced to engineering applications. (C) 2013 AIP Publishing LLC.
Piezo tube stacked scanning tunneling microscope for use in extreme and confined environments

Jihao Wang,Mengbo Sun

DOI: https://doi.org/10.1016/j.micron.2024.103719

IF: 2.381

Micron

Abstract:Scanning Tunneling Microscopy (STM) is widely used for observing atomic structures due to its ultra-high spatial resolution. As the core units of STM, the coarse stepper motor and imaging unit, have conflicting size requirements for piezo tubes. Longer piezo tubes yield greater output force and easier movement for the motor, while shorter tubes enhance imaging precision and stability for the scanner. Traditional STMs typically employ a large piezo tube for coarse stepping and a smaller one for independent imaging to address this issue. Here, we present the new design of a piezo tube stacked STM, in which two independent piezo tubes act together during tip-sample approach process and only one shorter tube works during scanning imaging. Both tubes are fixed to the framework, ensuring high rigidity and compactness. The new design enables us to achieve both coarse stepping and imaging functions with a total length of only 25 mm for the two tubes, effectively reducing the length of whole STM, facilitating its integration into narrow low-temperature spaces for imaging applications. Using this device, we obtained high-quality atomic images of graphite sample surfaces at room temperature. Continuous scanning imaging of the same area on Au film at 300 K demonstrates the STM's high stability in both X-Y and Z directions. Atomic images, I-V spectra, and di/dv spectra obtained at 2 K on graphite surface illustrate the excellent application potential of this device in low-temperature environments. Finally, atomic images obtained of graphite in sweeping the magnetic fields from 0 T to 11 T in a huge vibrational dry magnet prove the new STM's excellent performance in extreme conditions.
A Novel Atomically Resolved Scanning Tunneling Microscope Capable of Working in Cryogen-Free Superconducting Magnet

Tao Geng,Jihao Wang,Wenjie Meng,Jing Zhang,Qiyuan Feng,Yubin Hou,Qingyou Lu

DOI: https://doi.org/10.3390/mi14030637

2023-03-11

Abstract:We present a novel homebuilt scanning tunneling microscope (STM) with atomic resolution integrated into a cryogen-free superconducting magnet system with a variable temperature insert. The STM head is designed as a nested structure of double piezoelectric tubes (PTs), which are connected coaxially through a sapphire frame whose top has a sample stage. A single shaft made of tantalum, with the STM tip on top, is held firmly by a spring strip inside the internal PT. The external PT drives the shaft to the tip-sample junction based on the SpiderDrive principle, and the internal PT completes the subsequent scanning and imaging work. The STM head is simple, compact, and easy to assemble. The excellent performance of the device was demonstrated by obtaining atomic-resolution images of graphite and low drift rates of 30.2 pm/min and 41.4 pm/min in the X-Y plane and Z direction, respectively, at 300K. In addition, we cooled the sample to 1.6 K and took atomic-resolution images of graphite and NbSe2. Finally, we performed a magnetic field sweep test from 0 T to 9 T at 70 K, obtaining distinct graphite images with atomic resolution under varying magnetic fields. These experiments show our newly developed STM's high stability, vibration resistance, and immunity to high magnetic fields.
Dual Imaging-Unit Atomic Force Microscope And Its Application In Nanometer Order Length Metrolegy

Xf Lin,Hj Zhang,Dx Zhang,H Zhang

2002-01-01

Abstract:Two AFM units were combined in the DIU-AFM, one as a reference unit, and the other a test one. Their probes with Z piezo elements and tips were horizontally set in parallel at the same height to reduce Abbe's errors. A reference sample and a test sample were attached to one single XY scanner on the same surface, and were imaged by the AFM units at the same time. These two images have the same lateral size, and thus the length of the test sample image could be accurately measured by counting the periodic features in the reference one. The most remarkable advantages of the DIU-AFM include: the scanning errors caused by the non-linearity or hysteresis of the piezoscanner can be successfully avoided; moreover, it's practically able to measure conductive and/or non-conductive samples. Some comparative experiments made by using periodic features of porous alumina film as reference scales were demonstrated for simultaneous length calibration. Experiments show a satisfactory matching and a wide scan range of up to 5 mum. With different reference scales, the DIU-AFM is capable of realizing nanometer and/or sub-micron length metrology accuracy for test samples with any conductivity.

Dual Tunneling Unit Scanning Tunneling Microscope for Nano-Metrology

Dual imaging unit scanning tunneling microscope for NANO-metrology based on atomic reference scale

A wide-range metrology AFM and its applications

Long Range And Accurate Measurement Of Deep Trench Microstructures By A Specialized Scanning Tunneling Microscope

A novel scanning tunneling microscopy for long range and high aspect ratio measurement

Dual imaging-unit atomic force microscope for nanometer order length metrology based on reference scales

Dual-Servo Mechanism of STM for Measurement of Sub Millimeter Deep Trench Structures

Scanning Tunneling Microscopy-Based in Situ Measurement of Fast Tool Servo-Assisted Diamond Turning Micro-Structures

Scanning Tunneling Microscopy-Basedin Situmeasurement of Fast Tool Servo-Assisted Diamond Turning Micro-Structures

Ultrahigh Vacuum, Variable Temperature, Dual Scanning Tunneling Microscope System Operating under High Magnetic Field

Large-area profile measurement of sinusoidal freeform surfaces using a new prototype scanning tunneling microscopy

Design and test of the nanostructure-reaccessible UHVSTM system

Double-Tip Scanning Tunneling Microscope for Surface-Analysis

Scanning tunneling microscopy-based on-machine measurement for diamond fly cutting of micro-structured surfaces

Long-range Scanning Tunneling Microscope for the study of nanostructures on insulating substrates

Four-Probe Scanning Tunnelling Microscope with Atomic Resolution for Electrical and Electro-Optical Property Measurements of Nanosystems

Wide-range length metrology by dual-imaging-unit atomic force microscope based on porous alumina.

Note: Symmetric Modulation Methodology Applied In Improving The Performance Of Scanning Tunneling Microscopy

Piezo tube stacked scanning tunneling microscope for use in extreme and confined environments

A Novel Atomically Resolved Scanning Tunneling Microscope Capable of Working in Cryogen-Free Superconducting Magnet

Dual Imaging-Unit Atomic Force Microscope And Its Application In Nanometer Order Length Metrolegy