Auto-tracking Single Point Diamond Cutting on Non-Planar Brittle Material Substrates by a High-Rigidity Force Controlled Fast Tool Servo

Yuan-Liu Chen,Yindi Cai,Keisuke Tohyama,Yuki Shimizu,So Ito,Wei Gao

DOI: https://doi.org/10.1016/j.precisioneng.2017.02.014

IF: 3.315

2017-01-01

Precision Engineering

Abstract:This paper presents auto-tracking single point diamond cutting, which can conduct precision cutting on non-planar brittle material substrates without prior knowledge of their surface forms, by utilizing a force controlled fast tool servo (FTS). Differing from traditional force feedback control machining based on a cantilever mechanism such as an atomic force microscope (AFM) that suffers from low-rigidity and limited machining area, the force controlled FTS utilizes a highly-rigid piezoelectric-type force sensor integrated with a tool holder of the FTS system to provide sufficient stiffness and robustness for force controlled cutting of brittle materials. It is also possible for the system to be integrated with machine tools to deal with the difficulties in the cutting of large area non-planar brittle materials, which requires not only high machining efficiency but also a high stiffness. Experimental setup is developed by integrating the force controlled FTS to a four-axis ultra-precision diamond turning machine. For the verification of the feasibility and effectiveness of the proposed cutting strategy and system, auto-tracking diamond cutting of micro-grooves is conducted on an inclined silicon substrate and a convex BK7 glass lens, while realizing constant depths of cuts under controlled thrust forces. (C) 2017 Elsevier Inc. All rights reserved.