Atomic precision imaging with an on-chip scanning tunneling microscope integrated into a commercial ultrahigh vacuum STM system

Afshin Alipour,S. O. Reza Moheimani,James H. G. Owen,Ehud Fuchs,John N. Randall
DOI: https://doi.org/10.1116/6.0001107
2021-07-01
Abstract:In this article, we replace the Z axis of the piezotube of a conventional Ultrahigh-Vacuum (UHV) Scanning Tunneling Microscope (STM) with a one-degree-of-freedom Microelectromechanical-System (MEMS) nanopositioner. As a result, a hybrid system is realized in which motions in the XY plane are carried out by the piezotube, while the MEMS device performs the Z-axis positioning with a smaller footprint and higher sensitivity. With the proposed system and a feedback loop, STM imaging is conducted on an H-passivated Si (100)-2×1 sample in a UHV condition, demonstrating that this on-chip STM is conducive to atomic precision scanning tunneling microscopy.
engineering, electrical & electronic,nanoscience & nanotechnology,physics, applied
What problem does this paper attempt to address?