Accurate Vertical Nanoelectromechanical Measurements

Roger Proksch,Ryan Wagner,Joel Lefever
2023-10-09
Abstract:Accurate measurements of the nanoscale electromechanical coupling in materials, including piezo and ferroelectrics, twisted 2D layers, and biological systems is of both fundamental scientific and applied importance. Piezoresponse Force Microscopy (PFM) is capable of detecting strains in these materials, down to the picometer range. Following the emergence of weaker materials, the smaller signals associated with them have revealed various crosstalk challenges that have limited the accuracy of measurements. Previous work demonstrated that the use of an interferometric displacement sensor (IDS) positioned appropriately above the tip of the cantilever (x/L~1), where x is the spot position and L is the cantilever length, has enabled sensitive and artifact-free electromechanical measurements. A similar approach has been employed in removing unwanted electrostatic and in-plane response contributions for the optical beam deflection (OBD) measurement technique commonly used in most atomic force microscopes. In the present study, extensive automated sub-resonance spot position dependent PFM measurements were conducted on periodically poled lithium niobate (PPLN). In this work, both IDS and OBD responses were measured simultaneously, allowing direct comparisons of the two approaches. The IDS showed a blind spot at x/L~1, as expected. However, for OBD measurements, the blind spot's location exhibited wider variation, ranging from 0.15<x/L<0.61. Furthermore, the magnitudes of the amplitudes measured with IDS and OBD were typically different, sometimes approaching disagreement by a factor of two. These measurements have important implications, not only for the PPLN measured here, but for more complex and unknown samples that have a heterogeneous polarization and electrical characteristic.
Mesoscale and Nanoscale Physics,Materials Science
What problem does this paper attempt to address?
The problem that this paper attempts to solve is how to improve the accuracy of nano - scale electromechanical coupling measurements in piezoresponse force microscopy (PFM) measurements, especially in the face of signal crosstalk and inaccurate measurements encountered when dealing with weaker materials. Specifically: 1. **Reduce crosstalk errors**: As research on weaker materials increases, the signals generated by these materials are smaller, leading to the ubiquitous crosstalk challenge, which limits the accuracy of measurements and may even completely mask the true signal. 2. **Verify theoretical predictions**: Verify theoretical predictions about the electromechanical response of materials such as lithium niobate (LNO) in the strong indentation contact limit through experiments, such as the \(d_{\text{eff}} \approx 12 \, \text{pm/V}\) predicted by Kalinin et al. 3. **Optimize measurement methods**: Explore and compare the effectiveness of different detection methods (such as the optical beam deflection method OBD and the interferometric displacement sensor IDS) in eliminating the bulk electrostatic (BES) effect and other interfering factors, especially by adjusting the laser spot position to achieve more accurate measurements. 4. **Quantitatively explain differences**: Explain why there are significant differences (sometimes up to 100%) in the measured signal amplitudes when measurements are made at different positions (such as OBD at \(x/L \approx 0.6\) and IDS at \(x/L \approx 1\)), and theoretically explain the reasons for these phenomena. ### Specific problems - **Sources of crosstalk and errors**: The article points out that as the strength of the research material decreases, the signal becomes smaller, causing the crosstalk problem to become more serious and affecting the accuracy of the measurement. - **Agreement between theory and experiment**: Whether the experimental results can verify the predictions of theoretical models (such as the Euler - Bernoulli beam model), especially when considering longitudinal forces and bulk electrostatic forces. - **Improvement of measurement techniques**: How to reduce crosstalk and errors in measurements by adjusting the laser spot position (such as OBD at \(x/L \approx 0.6\) and IDS at \(x/L \approx 1\)) to obtain more accurate results. ### Solutions - **Experimental verification**: Through a large number of automated, sub - resonant - frequency spot - position - dependent measurements, using both IDS and OBD techniques simultaneously, directly compare the effects of the two methods. - **Theoretical explanation**: Use the Euler - Bernoulli beam model to explain the experimental results and illustrate the influence of bulk electrostatic forces and longitudinal forces on the measurement. - **Optimize measurement parameters**: Propose specific optimization methods, such as the Equal Amplitude Method (EAM), the Minimum Electrostatic Force Method (MEFM), and the Reference Sample Method (RSM), to find the optimal spot position, thereby reducing crosstalk and errors. Through these methods, researchers hope to improve the accuracy and reliability of PFM measurements, especially when dealing with weaker materials.