Synthesis and Microstructure of C-Axis Oriented Bi 4 Ti 3 O 12 Thin Films Using Sol-Gel Process on Silicon

Hao-Shuang Gu,Wen-Hua Sun,Shi-Min Wang,Tou-Shen Zhou,An-Xiang Kuang,Jian-She Liu,Xing-Jiao Li
DOI: https://doi.org/10.1007/bf01855611
1996-01-01
Journal of Materials Science Letters
Abstract:c-axis oriented Bi4Ti3O12films have been prepared on Pt/Ti/Si(111) substrates by sol-gel process. Crack-free films of 0.5 μm thickness were fabricated using a multilayer spinning technique and calcination at 600 °C for 30 min. The average grain size of the film is about 0.15 μm. The film exhibits ferroelectric hysteresis with remanent polarization Pr=4.8 μc/cm2 and coercive field Ec=70 kV/cm. The measured dielectric constant and loss factor at a frequency of 100 kHz are 170 and 0.02 respectively.
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