Incorporation of High Concentration Luminescent Er Centers in Si and Porous Si by Electroplating

Sheng Chi,Cai Yongming,Gong Dawei,Huang Darning,Liu Xiaohan,Wang Xun
DOI: https://doi.org/10.1557/proc-422-93
1996-01-01
MRS Proceedings
Abstract:It is found that Er could only be deposited on a Si cathode by electrolysis of near neutral ErCl3 electrolyte with a large current density. The deposited Er hydrolytic layer reacts with Si at 1200°C to form the activated Er centers that emit a 1.53μm photoluminescence peak at room temperature. By applying this process to porous Si, an apparent doping concentration of Er larger than 1019/cm3 in the whole porous Si layer and a strong PL intensity with little temperature quenching are achieved.
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