Luminescence of Er Doped in Silicon by Electrochemical Method

C Sheng,YM Cai,DW Gong,YL Fan,XH Liu,DM Huang,X Wang
1997-01-01
Progress in Natural Science
Abstract:Early in 1983, Ennen et al. first realized the photoluminescence (PL) and the electroluminescence (EL) of Er-doped Si (Si: Er) at the wavelength of 1.53 μm. An Si-based lightemitting diode (LED), working at this wavelength, will be an essential device on a single chip of Si-based optoelectronic integrated circuit for optical fiber communication. Two problems must be solved before Si:Er LEDs can meet the requirement of practical uses. First, it is needed to in-
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